Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement
Schmidt, Daniel, Cepler, Aron, Durfee, Curtis, Pancharatnam, Shanti, Frougier, Julien, Breton, Mary, Greene, Andrew, Klare, Mark, Koret, Roy, Turovets, Igor
Published in IEEE transactions on semiconductor manufacturing (01.08.2022)
Published in IEEE transactions on semiconductor manufacturing (01.08.2022)
Get full text
Journal Article
높은 처리량 광학 계측
SHICHTMAN ALEX, MATUSOVSKY MISHA, YALOV SHIMON, TUROVETS IGOR, PAZ SHACHAR
Year of Publication 27.04.2023
Get full text
Year of Publication 27.04.2023
Patent
Advanced EUV Resist Characterization using Scatterometry and Machine Learning
Schmidt, Daniel, Petrillo, Karen, Breton, Mary, Fullam, Jennifer, Koret, Roy, Turovets, Igor, Cepler, Aron
Published in 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (10.05.2021)
Published in 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (10.05.2021)
Get full text
Conference Proceeding
2차원 구조적 요소 어레이의 국부 임계 치수 균일성 측정장치 및 그 방법
CHENG MARJORIE, SCHMIDT DANIEL, TUROVETS IGOR, KORET ROY, CEPLER ARON J, KONG DEXIN
Year of Publication 08.11.2022
Get full text
Year of Publication 08.11.2022
Patent
Ultra large pitch and depth structures metrology using spectral reflectometry in combination with RCWA based model and TLM Algorithm : AM: Advanced Metrology
Vito, Annalisa Del, Osherov, Ilya, Urbanowicz, Adam Michal, Katz, Yinon, Barkan, Kobi, Turovets, Igor, Haupt, Ronny
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
Get full text
Conference Proceeding
Development of SiGe Indentation Process Control to Enable Stacked Nanosheet FET Technology
Kong, Dexin, Schmidt, Daniel, Breton, Mary, de la pena, Abraham Arceo, Frougier, Julien, Greene, Andrew, Zhang, Jingyun, Basker, Veeraraghavan, Loubet, Nicolas, Ahsan, Ishtiaq, Cepler, Aron, Klare, Mark, Cheng, Marjorie, Koret, Roy, Turovets, Igor
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
Get full text
Conference Proceeding
Implementation of Spectral Interferometry for Enhanced Critical Dimensions Optical Metrology
Shafir, Dror, Shtainman, Roy, Turovets, Igor
Published in 2021 China Semiconductor Technology International Conference (CSTIC) (14.03.2021)
Published in 2021 China Semiconductor Technology International Conference (CSTIC) (14.03.2021)
Get full text
Conference Proceeding
CD metrology for EUV lithography and etch
Johanesen, Hayley, Kenslea, Anne, Williamson, Mark, Knowles, Matt, Kwakman, Laurens, Levi, Shimon, Nishry, Noam, Adan, Ofer, Englard, Ilan, Van Puymbroeck, Jan, Felder, Dan, Gov, Shahar, Cohen, Oded, Turovets, Igor
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Get full text
Conference Proceeding