Using an ammonia treatment to improve the floating-gate spacing in split-gate flash memory
Wen-Ting Chu, Hao-Hsiung Lin, Yeur-Luen Tu, Yu-Hsiung Wang, Chia-Ta Hsieh, Hung-Cheng Sung, Yung-Tao Lin, Chia-Shiung Tsai, Wang, C.S.
Published in IEEE electron device letters (01.09.2004)
Published in IEEE electron device letters (01.09.2004)
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Journal Article
Plasma charging defect characterization, inspection, and monitors in poly-buffered STI
YU, Chih-Hsin, CHI, Min-Hwa, LIOU, Yuan-Hung, TU, Yeur-Luen, WU, Chi-San, CHEN, Yu-Shen, PAI, Chih-Yang, TSAI, Chia-Shiung
Published in IEEE transactions on semiconductor manufacturing (01.11.2002)
Published in IEEE transactions on semiconductor manufacturing (01.11.2002)
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Journal Article
Highly Reliable Piezoelectric Process Technology in Volume Foundry for Emerging Mems Applications
Shih, Victor, Cheng, Sean, Lin, You-Ru, Lin, Anderson, Liao, Yan-Jie, Lin, Ching-Hui, Huang, Fu-Chun, Tai, Kelvin, Hu, Fan, Tsai, Yi-Heng, Chen, Yen-Wen, Chang, Kai-Fung, Chiu, Ching-Hua, Tsai, Leo, Teng, Vincent, Chen, Chih-Ming, Yu, Terrence, Tu, Yeur-Luen, Tseng, Lee-Chuan, Lee, Julian, Chen, Benior, Huang, Shih-Fen, Kalnitsky, Alexander
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
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Conference Proceeding
Image sensor having stacked metal oxide films as fixed charge film
Lai, Chih-Yu, Tsai, Min-Ying, Trinh, Hai-Dang, Tu, Yeur-Luen, Tsai, Cheng-Yuan
Year of Publication 03.09.2024
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Year of Publication 03.09.2024
Patent
Multi-layered polysilicon and oxygen-doped polysilicon design for RF SOI trap-rich poly layer
Wu, Cheng-Ta, Chen, Eugene, Cheng, Yu-Hung, Chiang, Chen-Hao, Tu, Yeur-Luen, Kalnitsky, Alexander
Year of Publication 27.08.2024
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Year of Publication 27.08.2024
Patent
DUAL FACING BSI IMAGE SENSORS WITH WAFER LEVEL STACKING
Tsai, Chia-Shiung, Liu, Ping-Yin, Tseng, Pin-Nan, Tu, Yeur-Luen, Chen, Xiaomeng
Year of Publication 30.05.2024
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Year of Publication 30.05.2024
Patent