Surface sulfurization of amorphous carbon films in the chemistry of oxygen plasma added with SO2 or OCS for high-aspect-ratio etching
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Published in Applied surface science (01.02.2024)
Published in Applied surface science (01.02.2024)
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Journal Article
DRY ETCHING METHOD FOR CARBON ATOM-CONTAINING FILM
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Year of Publication 25.01.2024
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Year of Publication 25.01.2024
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METHOD FOR DRY ETCHING CARBON ATOM-CONTAINING FILM
ISHIKAWA Kenji, HORI Masaru, AOKI Yuta, NGUYEN Thi Thuy Nga, TSUNO Shuji
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Year of Publication 25.01.2024
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METHOD FOR PURIFYING AMMONIA AND AMMONIA PURIFICATION SYSTEM
FUKUSHIMA ATSUHITO, TAI SHINICHI, HATA HIROYUKI, MORIMOTO SHIGERU, YOSHIDA YOSHINORI, TSUNO SHUJI
Year of Publication 24.12.2013
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Year of Publication 24.12.2013
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METHOD FOR PURIFYING AMMONIA AND AMMONIA PURIFICATION SYSTEM
HATA, HIROYUKI, TSUNO, SHUJI, YOSHIDA, YOSHINORI, TAI, SHINICHI, FUKUSHIMA, ATSUHITO, MORIMOTO, SHIGERU
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Year of Publication 04.10.2012
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SYSTEM FOR PURIFYING AMMONIA
FUKUSHIMA ATSUHITO, TAI SHINICHI, MORIMOTO SHIGERU, KITAGISHI NOBUYUKI, TSUNO SHUJI, AMITANI TOMIHARU
Year of Publication 14.05.2012
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Year of Publication 14.05.2012
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