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Published in IEEE transactions on semiconductor manufacturing (01.11.1998)
Published in IEEE transactions on semiconductor manufacturing (01.11.1998)
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Published in IEEE transactions on semiconductor manufacturing (01.02.1996)
Published in IEEE transactions on semiconductor manufacturing (01.02.1996)
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Year of Publication 23.06.2000
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Year of Publication 31.03.1998
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MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
KAJITANI KAZUHIKO, TSUNENO KATSUMI, KUMAUCHI TAKAHIRO, YOSHIDA MAKOTO
Year of Publication 12.12.1997
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Year of Publication 12.12.1997
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