Thickness dependent integrity of gate oxide on SOI
Tsujiuchi, Mikio, Iwamatsu, Toshiaki, Naruoka, Hideki, Umeda, Hiroshi, Ipposhi, Takashi, Maegawa, Shigeto, Inoue, Yasuo
Published in Applied surface science (30.06.2003)
Published in Applied surface science (30.06.2003)
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