Deposition of Highly Oriented Ta 2 O 5 Piezoelectric Thin Films on Silicon for Fabricating Film Bulk Acoustic Resonator Structure by RF Magnetron Sputtering
Kakio, Shoji, Tsuchiya, Akinori, Nakagawa, Yasuhiko
Published in Japanese Journal of Applied Physics (01.07.2011)
Published in Japanese Journal of Applied Physics (01.07.2011)
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Journal Article
Deposition of Highly Oriented Ta 2 O 5 Piezoelectric Thin Films on Silicon for Fabricating Film Bulk Acoustic Resonator Structure by RF Magnetron Sputtering
Kakio, Shoji, Tsuchiya, Akinori, Nakagawa, Yasuhiko
Published in Japanese Journal of Applied Physics (01.07.2011)
Published in Japanese Journal of Applied Physics (01.07.2011)
Get full text
Journal Article
Deposition of highly oriented Ta2O5 piezoelectric thin films on silicon for fabricating film bulk acoustic resonator structure by RF magnetron sputtering
Kakio, Shoji, Tsuchiya, Akinori, Mitsui, Takeshi, Nakagawa, Yasuhiko
Published in 2010 IEEE International Ultrasonics Symposium (01.10.2010)
Published in 2010 IEEE International Ultrasonics Symposium (01.10.2010)
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Conference Proceeding
Highly oriented ta2o5 piezoelectric thin films prepared by rf-magnetron sputtering
Kakio, Shoji, Mitsui, Takeshi, Tsuchiya, Akinori, Nakagawa, Yasuhiko
Published in 2009 IEEE International Ultrasonics Symposium (01.09.2009)
Published in 2009 IEEE International Ultrasonics Symposium (01.09.2009)
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Conference Proceeding