베이킹 후에 기판을 냉각하는 방법들 및 챔버
TSO ALAN L, LUBOMIRSKY DMITRY, KIM HYUNJUN, YIEH ELLIE Y, BUCHBERGER JR. DOUGLAS A, ATHANI SHEKHAR, LIANG QIWEI
Year of Publication 04.07.2024
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Year of Publication 04.07.2024
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프로세스 유체들의 검증 및 재사용을 위한 장치 및 방법들
TSO ALAN L, HUANG LANCELOT, LUBOMIRSKY DMITRY, NEMANI SRINIVAS D, PISHARODY GAUTAM, DAI HUIXIONG, BUCHBERGER JR. DOUGLAS A, NGAI CHRISTOPHER S, BANGAR MANGESH ASHOK
Year of Publication 05.12.2023
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Year of Publication 05.12.2023
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필드 가이드 노출 후 베이킹 프로세스를 위한 프로세스 셀
TSO ALAN L, KOZHIKKALKANDI RAHUL, LUBOMIRSKY DMITRY, HUANG LANCELOT, ALEX NITHIN THOMAS, YIEH ELLIE Y, BUCHBERGER JR. DOUGLAS A, HANSON KYLE M, SUN JIAYI, MCHUGH PAUL R, LIANG QIWEI
Year of Publication 01.12.2023
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Year of Publication 01.12.2023
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CHAMBER AND METHODS OF COOLING A SUBSTRATE AFTER BAKING
LIANG, Qiwei, YIEH, Ellie Y, ATHANI, Shekhar, TSO, Alan L, LUBOMIRSKY, Dmitry, KIM, Hyunjun, BUCHBERGER, JR
Year of Publication 01.06.2023
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Year of Publication 01.06.2023
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CHAMBER AND METHODS OF COOLING A SUBSTRATE AFTER BAKING
LIANG, Qiwei, YIEH, Ellie Y, ATHANI, Shekhar, TSO, Alan L, BUCHBERGER, Jr., Douglas A, LUBOMIRSKY, Dmitry, KIM, Hyunjun
Year of Publication 25.05.2023
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Year of Publication 25.05.2023
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PROCESS CELL FOR FILED GUIDED POST EXPOSURE BAKE PROCESS
SUN, Jiayi, HANSON, Kyle M, LIANG, Qiwei, YIEH, Ellie Y, HUANG, Lancelot, MCHUGH, Paul R, TSO, Alan L, BUCHBERGER, Jr., Douglas A, KOZHIKKALKANDI, Rahul, LUBOMIRSKY, Dmitry, ALEX, Nithin Thomas
Year of Publication 16.05.2024
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Year of Publication 16.05.2024
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Apparatus and methods for verification and re-use of process fluids
Bangar, Mangesh Ashok, Pisharody, Gautam, Huang, Lancelot, Lubomirsky, Dmitry, Ngai, Christopher Siu Wing, Buchberger, Jr., Douglas A, Dai, Huixiong, Nemani, Srinivas D, Tso, Alan L
Year of Publication 21.03.2023
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Year of Publication 21.03.2023
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APPARATUS AND METHODS FOR VERIFICATION AND RE-USE OF PROCESS FLUIDS
BANGAR, Mangesh Ashok, PISHARODY, Gautam, Ngai, Christopher Siu Wing, HUANG, Lancelot, TSO, Alan L, LUBOMIRSKY, Dmitry, NEMANI, Srinivas D, BUCHBERGER, JR., Douglas A, DAI, Huixiong
Year of Publication 06.10.2022
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Year of Publication 06.10.2022
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PROCESS CELL FOR FIELD GUIDED POST EXPOSURE BAKE PROCESS
SUN, Jiayi, BUCHBERGER, Jr. Douglas A, HANSON, Kyle M, LIANG, Qiwei, YIEH, Ellie Y, HUANG, Lance, MCHUGH, Paul R, TSO, Alan L, KOZHIKKALKANDI, Rahul, LUBOMIRSKY, Dmitry, ALEX, Nithin Thomas
Year of Publication 06.10.2022
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Year of Publication 06.10.2022
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Chamber and methods of cooling a substrate after baking
LUBOMIRSKY, DMITRY, TSO, ALAN L, BUCHBERGER JR., DOUGLAS A, LIANG, QIWEI, YIEH, ELLIE Y, KIM, HYUN-JUN, ATHANI, SHEKHAR
Year of Publication 16.06.2023
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Year of Publication 16.06.2023
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Apparatus and methods for verification and re-use of process fluids
TSO, ALAN L, LUBOMIRSKY, DMITRY, NGAI, CHRISTOPHER SIU WING, DAI, HUIXIONG, BANGAR, MANGESH ASHOK, BUCHBERGER JR., DOUGLAS A, PISHARODY, GAUTAM, HUANG, LANCELOT, NEMANI, SRINIVAS D
Year of Publication 16.01.2023
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Year of Publication 16.01.2023
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Process cell for field guided post exposure bake process
LUBOMIRSKY, DMITRY, TSO, ALAN L, HANSON, KYLE M, SUN, JIA-YI, KOZHIKKALKANDI, RAHUL, BUCHBERGER JR., DOUGLAS A, LIANG, QIWEI, YIEH, ELLIE Y, HUANG, LANCE LAN-SI, MCHUGH, PAUL R, ALEX, NITHIN THOMAS
Year of Publication 16.11.2022
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Year of Publication 16.11.2022
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