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Year of Publication 18.11.2003
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Year of Publication 18.11.2003
Patent
Wafer pressure regulation system for polishing machine
Lai, Chien-Hsin, Hsieh, Cheng-Chi, Tseng, Jung-Nan, Lin, Huang-Yi, Yu, Fu-Yang
Year of Publication 30.01.2003
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Year of Publication 30.01.2003
Patent
Chemical mechanical polishing apparatus
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Year of Publication 29.01.2002
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Year of Publication 29.01.2002
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Wafer pressure regulation system for polishing machine
TSENG JUNG-NAN, LAI CHIEN-HSIN, LIN HUANG-YI, HSIEH CHENGI, YU FU-YANG
Year of Publication 18.11.2003
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Year of Publication 18.11.2003
Patent
Wafer pressure regulation system for polishing machine
TSENG JUNG-NAN, LAI CHIEN-HSIN, LIN HUANG-YI, HSIEH CHENGI, YU FU-YANG
Year of Publication 30.01.2003
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Year of Publication 30.01.2003
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Chemical mechanical polishing apparatus
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Year of Publication 29.01.2002
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Year of Publication 29.01.2002
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