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Year of Publication 24.06.2024
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Year of Publication 08.02.2023
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LED PVD PVD BUFFER LAYERS FOR LED FABRICATION
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Year of Publication 02.12.2019
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RAVI JALLEPALLY, MATSUSHITA TOMOHARU, TSAI CHENG HSIUNG MATTHEW, YUAN XIAOXIONG, KAMATH ARAVIND MIYAR, KOPPA MANJUNATHA
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Year of Publication 15.03.2017
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LIFT PIN ASSEMBLY
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Year of Publication 07.02.2017
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Year of Publication 07.02.2017
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FINNED SHUTTER DISK FOR A SUBSTRATE PROCESS CHAMBER
SUH, SONG MOON, CHIA BONNIE T, TSAI CHENG HSIUNG MATTHEW, DINSMORE ROBERT, MORI GLEN T
Year of Publication 22.09.2015
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Year of Publication 22.09.2015
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SUBSTRATE SUPPORT FOR PLASMA ETCH OPERATIONS
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Year of Publication 20.11.2015
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Detachable biasable electrostatic chuck for high temperature applications
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Year of Publication 30.01.2024
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Year of Publication 30.01.2024
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METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES
XIE, Xiangjin, LEAL CERVANTES, Carmen, XU, Wenjing, JANSEN, Alexander, CHEN, Feng, TSAI, Cheng-Hsiung Matthew, CHEN, Lu, KAMATH, Aravind, HA, Tae Hong, TANG, Xianmin
Year of Publication 06.06.2024
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Year of Publication 06.06.2024
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Base plate for a processing chamber substrate support
Sansoni, Steven V, Sundararajan, Mukund, Rao, Shreesha Yogish, Tsai, Cheng-Hsiung Matthew, Koppa, Manjunatha P
Year of Publication 09.08.2022
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Year of Publication 09.08.2022
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Methods and apparatus for precleaning and treating wafer surfaces
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Year of Publication 26.03.2024
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Year of Publication 26.03.2024
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Base plate for a processing chamber substrate support
Sansoni, Steven V, Sundararajan, Mukund, Rao, Shreesha Yogish, Tsai, Cheng-Hsiung Matthew, Koppa, Manjunatha P
Year of Publication 05.04.2022
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Year of Publication 05.04.2022
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DETACHABLE BIASABLE ELECTROSTATIC CHUCK FOR HIGH TEMPERATURE APPLICATIONS
RAO, Shreesha Yogish, SUNDARARAJAN, Mukund, TSAI, Cheng-Hsiung Matthew, KOPPA, Manjunatha P, SANSONI, Steven V
Year of Publication 31.12.2020
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Year of Publication 31.12.2020
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