Heavy metal incorporated helium ion active hybrid non-chemically amplified resists: Nano-patterning with low line edge roughness
Reddy, Pulikanti Guruprasad, Thakur, Neha, Lee, Chien-Lin, Chien, Sheng-Wei, Pradeep, Chullikkattil P., Ghosh, Subrata, Tsai, Kuen-Yu, Gonsalves, Kenneth E.
Published in AIP advances (01.08.2017)
Published in AIP advances (01.08.2017)
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Journal Article
Fresnel Zone Plate Manufacturability Analysis for Direct-Write Lithography by Simulating Focusing and Patterning Performance versus Fabrication Errors
Tsai, Kuen-Yu, Chen, Sheng-Yung, Pei, Ting-Han, Li, Jia-Han
Published in Japanese Journal of Applied Physics (01.06.2010)
Published in Japanese Journal of Applied Physics (01.06.2010)
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Journal Article
Impact of Process-Effect Correction Strategies on Variability of Critical Dimension and Electrical Characteristics in Extreme Ultraviolet Lithography
Ng, Philip C. W, Chien, Sheng-Wei, Chang, Bo-Sen, Tsai, Kuen-Yu, Lu, Yi-Chang, Li, Jia-Han, Chen, Alek C
Published in Japanese Journal of Applied Physics (01.06.2011)
Published in Japanese Journal of Applied Physics (01.06.2011)
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Journal Article
eVTOL, UAM, and AAM: Brief Development History and Implementation Outlook of the United States
Tsai, Kuen-Yu, Meng, Guang-Yun, Wu, Tung-Ling, Zheng, Ming-Hui, Wang, Wei-Yao, Kung, Chih-Ming, Chen, Yen-Chuan, Huang, Chi-Fa, Hsieh, Tsang-Chieh, Hsu, Hsin-Sheng, Lin, Huei-Der, Shi, Jing-Xiang
Published in 2023 IEEE International Conference on e-Business Engineering (ICEBE) (04.11.2023)
Published in 2023 IEEE International Conference on e-Business Engineering (ICEBE) (04.11.2023)
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Conference Proceeding
Study of etching bias modeling and correction strategies for compensation of patterning process effects
Ng, Philip C.W., Tsai, Kuen-Yu, Melvin, Lawrence S.
Published in Microelectronic engineering (01.10.2013)
Published in Microelectronic engineering (01.10.2013)
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Journal Article
Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution
Lee, Yen-Min, Chen, Szu-Hung, Hsu, Chen-Pin, Chiou, Pei-Chuen, Tsai, Kuen-Yu, Chung, Tien-Tung, Tsai, Cheng-Han, Liu, Zhan-Yu, Li, Jia-Han
Published in Journal of Optics (01.08.2015)
Published in Journal of Optics (01.08.2015)
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Journal Article
Design of an electron-optical system with a ball-tip emission source through a numerical optimization method for high-throughput electron-beam-direct-write lithography
Lee, Hsuan-Ping, Chen, Sheng-Yung, Liu, Chun-Hung, Ding, Qi, Shen, Yu-Tian, Tsai, Kuen-Yu
Published in Japanese Journal of Applied Physics (01.06.2015)
Published in Japanese Journal of Applied Physics (01.06.2015)
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Journal Article
Silicon photodiodes for electron beam position and drift detection in scanning electron microscopy and electron beam lithography system
Kuo, Yi-Hung, Wu, Cheng-Ju, Yen, Jia-Yush, Chen, Sheng-Yung, Tsai, Kuen-Yu, Chen, Yung-Yaw
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.07.2011)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.07.2011)
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Journal Article
Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises
Lee, Yen-Min, Li, Jia-Han, Wang, Fu-Min, Cheng, Hsin-Hung, Shen, Yu-Tian, Tsai, Kuen-Yu, Shieh, Jason J, Chen, Alek C
Published in Journal of Optics (01.06.2014)
Published in Journal of Optics (01.06.2014)
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Journal Article
Manufacturability Analysis of a Micro-Electro-Mechanical Systems--Based Electron-Optical System Design for Direct-Write Lithography
Chen, Sheng-Yung, Chen, Shin-Chuan, Chen, Hsing-Hong, Tsai, Kuen-Yu, Pan, Hsin-Hung
Published in Japanese Journal of Applied Physics (01.06.2010)
Published in Japanese Journal of Applied Physics (01.06.2010)
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Journal Article
Impact of Process-Effect Correction Strategies on Variability of Critical Dimension and Electrical Characteristics in Extreme Ultraviolet Lithography
Ng, Philip C. W., Chien, Sheng-Wei, Chang, Bo-Sen, Tsai, Kuen-Yu, Lu, Yi-Chang, Li, Jia-Han, Chen, Alek C.
Published in Japanese Journal of Applied Physics (01.06.2011)
Published in Japanese Journal of Applied Physics (01.06.2011)
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Journal Article
The effect of NBTI on 3D integrated circuits
Cheng-Hong Lin, Yi-Chang Lu, Chin-Khai Tang, Kuen-Yu Tsai
Published in 2012 IEEE Electrical Design of Advanced Packaging and Systems Symposium (EDAPS) (01.12.2012)
Published in 2012 IEEE Electrical Design of Advanced Packaging and Systems Symposium (EDAPS) (01.12.2012)
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Conference Proceeding