Advanced Carriers on Legacy CMP Tools - an Intelligent Solution for Flexible Production Environments and R&D Labs
Franz, Mathias, Schubert, Ina, Junghans, Romy, Martinka, Ronny, Rudolph, Catharina, Wachsmuth, Holger, Trojan, Dan, VanDevender, Barrie, Wrschka, Peter, Gottfried, Knut Christoph
Published in ECS transactions (28.07.2016)
Published in ECS transactions (28.07.2016)
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Planarization limbo with silicon wafers
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Published in 2015 International Conference on Planarization/CMP Technology (ICPT) (01.09.2015)
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Published in 2015 International Conference on Planarization/CMP Technology (ICPT) (01.09.2015)
Conference Proceeding
Advanced Carriers on Legacy CMP Tools - an Intelligent Solution for Flexible Production Environments and R&D Labs
Gottfried, Knut Christoph, VanDevender, Barrie, Trojan, Dan, Feeney, Paul, Schubert, Ina, Junghans, Romy, Martinka, Ronny, Franz, Mathias, Rudolph, Catharina, Wachsmuth, Holger
Published in Meeting abstracts (Electrochemical Society) (01.04.2016)
Published in Meeting abstracts (Electrochemical Society) (01.04.2016)
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Journal Article