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KIRKPATRICK, BRIAN K, TRENTMAN, BRIAN M, MONTGOMERY, CLINT L, PAK, RANDALL W
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Year of Publication 01.06.2007
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Post plasma clean process for a hardmask
Kirkpatrick, Brian K, Montgomery, Clint L, Trentman, Brian M, Pak, Randall W
Year of Publication 26.07.2005
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Year of Publication 26.07.2005
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Post plasma clean process for a hardmask
PAK RANDALL W, KIRKPATRICK BRIAN K, MONTGOMERY CLINT L, TRENTMAN BRIAN M
Year of Publication 26.07.2005
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Year of Publication 26.07.2005
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POST PLASMA CLEAN PROCESS FOR A HARDMASK
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Year of Publication 19.05.2005
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Post plasma clean process for a hardmask
PAK RANDALL W, KIRKPATRICK BRIAN K, MONTGOMERY CLINT L, TRENTMAN BRIAN M
Year of Publication 28.04.2005
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Year of Publication 28.04.2005
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Post plasma clean process for a hardmask
PAK RANDALL W, KIRKPATRICK BRIAN K, MONTGOMERY CLINT L, TRENTMAN BRIAN M
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Year of Publication 27.04.2005
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METHOD OF IMPROVING THE FLATNESS OF POLISHED SEMICONDUCTOR WAFERS
TRENTMAN, BRIAN, M, SMITH, WILLIAM, L, SMITH, JERRY, D, DAVIS, EUGENE, C, FRONTERHOUSE, DAVID, L, DANGEL, MICHAEL, D
Year of Publication 24.06.1999
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Year of Publication 24.06.1999
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Post plasma clean process for a hardmask
KIRKPATRICK, BRIAN K, TRENTMAN, BRIAN M, MONTGOMERY, CLINT L, PAK, RANDALL W
Year of Publication 01.08.2005
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Year of Publication 01.08.2005
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