EUV 소스에서 타겟 재료의 액적을 생성하기 위한 장치 및 방법
ERSHOV ALEXANDER IGOREVICH, DRIESSEN THEODORUS WILHELMUS, TELKAR VIKAS GIRIDHAR, TREES DIETMAR UWE HERBERT
Year of Publication 28.02.2024
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Year of Publication 28.02.2024
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타겟 재료 이송 시스템 구성 요소 및 그의 제조 방법
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Year of Publication 10.11.2023
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Year of Publication 10.11.2023
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액적 생성기용 노즐
SAMS BENJAMIN ANDREW, DRIESSEN THEODORUS WILHELMUS, JOHNSON BRANDON MICHAEL, BUIS EDWIN JOHAN, TREES DIETMAR UWE HERBERT
Year of Publication 21.06.2022
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Year of Publication 21.06.2022
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견고한 유체 커플링 장치
SAMS BENJAMIN ANDREW, ERSHOV ALEXANDER IGOREVICH, DRIESSEN THEODORUS WILHELMUS, KINCAL SERKAN, TELKAR VIKAS GIRIDHAR, TREES DIETMAR UWE HERBERT
Year of Publication 23.03.2023
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Year of Publication 23.03.2023
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리소그래피 방사선 시스템에서의 극자외선 광원을 위한 하이브리드 액적 생성기
SAMS BENJAMIN ANDREW, DRIESSEN THEODORUS WILHELMUS, BORGGREVE HERMAN HARRY, JOHNSON BRANDON MICHAEL, TELKAR VIKAS GIRIDHAR, TREES DIETMAR UWE HERBERT
Year of Publication 26.01.2023
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Year of Publication 26.01.2023
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극자외선 광원에서 유체 제어 디바이스 및 유체 제어 방법
SAMS BENJAMIN ANDREW, DRIESSEN THEODORUS WILHELMUS, ROLLINGER BOB, TREES DIETMAR UWE HERBERT
Year of Publication 25.01.2022
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Year of Publication 25.01.2022
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액적 생성기 성능을 모니터링 및 제어하는 장치 및 방법
ERSHOV ALEXANDER IGOREVICH, DRIESSEN THEODORUS WILHELMUS, ROLLINGER BOB, TREES DIETMAR UWE HERBERT, VASCHENKO GEORGIY OLEGOVICH, WINKELS KOEN GERHARDUS
Year of Publication 03.12.2020
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Year of Publication 03.12.2020
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DROPLET GENERATOR NOZZLE
Buis, Edwin Johan, Sams, Benjamin Andrew, Driessen, Theodorus Wilhelmus, Trees, Dietmar Uwe Herbert, Johnson, Brandon Michael
Year of Publication 17.11.2022
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Year of Publication 17.11.2022
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ROBUST FLUID COUPLING APPARATUS
Kincal, Serkan, Sams, Benjamin Andrew, Driessen, Theodorus Wilhelmus, Ershov, Alexander Igorevich, Trees, Dietmar Uwe Herbert, Telkar, Vikas Giridhar
Year of Publication 07.09.2023
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Year of Publication 07.09.2023
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DROPLET GENERATOR NOZZLE
TREES, Dietmar, Uwe, Herbert, BUIS, Edwin, Johan, DRIESSEN, Theodorus, Wilhelmus, JOHNSON, Brandon, Michael, SAMS, Benjamin, Andrew
Year of Publication 24.08.2022
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Year of Publication 24.08.2022
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HYBRID DROPLET GENERATOR FOR EXTREME ULTRAVIOLET LIGHT SOURCES IN LITHOGRAPHIC RADIATION SYSTEMS
Sams, Benjamin Andrew, Borggreve, Herman Harry, Driessen, Theodorus Wilhelmus, Trees, Dietmar Uwe Herbert, Johnson, Brandon Michael, Telkar, Vikas Giridhar
Year of Publication 01.06.2023
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Year of Publication 01.06.2023
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HYBRID DROPLET GENERATOR FOR EXTREME ULTRAVIOLET LIGHT SOURCES IN LITHOGRAPHIC RADIATION SYSTEMS
TELKAR, Vikas, Giridhar, TREES, Dietmar, Uwe, Herbert, BORGGREVE, Herman, Harry, DRIESSEN, Theodorus, Wilhelmus, JOHNSON, Brandon, Michael, SAMS, Benjamin, Andrew
Year of Publication 29.03.2023
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Year of Publication 29.03.2023
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APPARATUS FOR CONTROLLING INTRODUCTION OF EUV TARGET MATERIAL INTO AN EUV CHAMBER
BENJAMIN ANDREW SAMS, DIETMAR UWE HERBERT TREES, GEORGIY O. VASCHENKO
Year of Publication 10.07.2020
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Year of Publication 10.07.2020
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APPARATUS FOR AND METHOD OF ACCELERATING DROPLETS IN A DROPLET GENERATOR FOR AN EUV SOURCE
Rajyaguru, Chirag, Vaschenko, Georgiy Olegovich, Rafac, Robert Jay, Lukens, Joshua Mark, Driessen, Theodorus Wilhelmus, Ershov, Alexander Igorevich, Trees, Dietmar Uwe Herbert
Year of Publication 25.05.2023
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Year of Publication 25.05.2023
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HIGH PRESSURE AND VACUUM LEVEL SENSOR IN METROLOGY RADIATION SYSTEMS
CAVALIER, Grant, Steven, TREES, Dietmar, Uwe, Herbert, ATENCIO, Edgardo, Zamora, RAI, Sandeep, TEDROW, Jon, David, DRIESSEN, Theodorus, Wilhelmus, JOHNSON, Brandon, Michael, SAMS, Benjamin, Andrew, SWERDLOW, Ethan, Marcus, BESSEMS, David
Year of Publication 05.04.2023
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Year of Publication 05.04.2023
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