PIEZORESISTIVE MICROMECHANICAL SENSOR COMPONENT AND CORRESPONDING MEASURING METHOD
RETTIG CHRISTIAN, NEUL REINHARD, ENGESSER MANUEL, TRAUTMANN ACHIM, MEISEL DANIEL CHRISTOPH, BUHMANN ALEXANDER, FEYH ANDO
Year of Publication 18.01.2013
Get full text
Year of Publication 18.01.2013
Patent
An interconnected 2D-TM EBG structure for millimeter and submillimeter waves
Schuster, M., Klein, N., Ruther, P., Trautmann, A., Paul, O., Kuzel, P., Kadlec, F.
Published in IEEE journal on selected areas in communications (01.07.2005)
Published in IEEE journal on selected areas in communications (01.07.2005)
Get full text
Journal Article
Microelectromechanical HF resonators fabricated using a novel SOI-based low-temperature process
Ruther, P., Bartholomeyczik, J., Buhmann, A., Trautmann, A., Steffen, K., Paul, O.
Published in IEEE sensors journal (01.10.2005)
Published in IEEE sensors journal (01.10.2005)
Get full text
Journal Article