Method of making composite polishing layer for chemical mechanical polishing pad
BRUGAROLAS BRUFAU, TERESA, LUGO, DIEGO, QIAN, BAINIAN, VENEZIALE, DAVID MICHAEL, HENDRON, JEFFREY JAMES, TRAN, TONY QUAN, TONG, YUHUA, JACOB, GEORGE C, KOZHUKH, JULIA, MILLER, JEFFREY B, WANK, ANDREW, STACK, MARC R
Year of Publication 01.01.2017
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Year of Publication 01.01.2017
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Chemical mechanical polishing pad and method of making same
LUGO, DIEGO, DEGROOT, MARTY W, VENEZIALE, DAVID MICHAEL, JACOB, GEORGE C, KOZHUKH, JULIA, STACK, MARC R, BRUGAROLAS BRUFAU, TERESA, QIAN, BAINIAN, TRAN, TONY QUAN, YEH, FENGJI, TONG, YUHUA, MILLER, JEFFREY B, WANK, ANDREW
Year of Publication 01.01.2017
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Year of Publication 01.01.2017
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FR3037834
KOZHUKH JULIA, WANK ANDREW, YEH FENGJI, MILLER JEFFREY B, TRAN Tony Quan, QIAN BAINIAN, BRUGAROLAS BRUFAU TERESA, DEGROOT MARTY, TONG YUHUA, JACOB GEORGE C, LUGO DIEGO, STACK MARC R, VENEZIALE DAVID MICHAEL
Year of Publication 30.12.2016
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Year of Publication 30.12.2016
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FR3037836
BRUGAROLAS BRUFAU TERESA, KOZHUKH JULIA, HENDRON JEFFREY JAMES, TONG YUHUA, JACOB GEORGE C, LUGO DIEGO, STACK MARC R, VENEZIALE DAVID MICHAEL, WANK ANDREW, MILLER JEFFREY B, TRAN Tony Quan, QIAN BAINIAN
Year of Publication 30.12.2016
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Year of Publication 30.12.2016
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Chemisch-mechanisches Polierkissen und Verfahren zu dessen Herstellung
Lugo, Diego, Qian, Bainian, Miller, Jeffrey B, Yeh, Fengji, Stack, Marc R, Veneziale, David Michael, Jacob, George C, Kozhukh, Julia, Wank, Andrew, Tran, Tony Quan, Brufau, Teresa Brugarolas, Tong, Yuhua, DeGroot, Marty
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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Verfahren zur Herstellung einer Verbundpolierschicht für ein chemisch-mechanisches Polierkissen
Lugo, Diego, Qian, Bainian, Miller, Jeffrey B, Wank, Andrew, Tran, Tony Quan, Stack, Marc R, Brufau, Teresa Brugarolas, Tong, Yuhua, Veneziale, David Michael, Hendron, Jeffrey James, Jacob, George C, Kozhukh, Julia
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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Dissolution of metal particles produced by polishing
Tran, Tony Quan, Sachan, Vikas, Gettman, David, Thomas, Terence M, Lack, Craig D, Burke, Peter A
Year of Publication 05.08.2003
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Year of Publication 05.08.2003
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Dissolution of metal particles produced by polishing
TRAN TONY QUAN, SACHAN VIKAS, THOMAS TERENCE M, GETTMAN DAVID, LACK CRAIG D, BURKE PETER A
Year of Publication 05.08.2003
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Year of Publication 05.08.2003
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DISSOLUTION OF METAL PARTICLES PRODUCED BY POLISHING
GETTMAN, DAVID, THOMAS, TERENCE, M, BURKE, PETER, A, TRAN, TONY, QUAN, SACHAN, VIKAS, LACK, CRAIG, D
Year of Publication 03.07.2002
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Year of Publication 03.07.2002
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Dissolution of metal particles produced by polishing
TRAN TONY QUAN, SACHAN VIKAS, THOMAS TERENCE M, GETTMAN DAVID, LACK CRAIG D, BURKE PETER A
Year of Publication 08.11.2001
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Year of Publication 08.11.2001
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DISSOLUTION OF METAL PARTICLES PRODUCED BY POLISHING
GETTMAN, DAVID, THOMAS, TERENCE, M, BURKE, PETER, A, TRAN, TONY, QUAN, SACHAN, VIKAS, LACK, CRAIG, D
Year of Publication 26.07.2001
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Year of Publication 26.07.2001
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