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Published in Japanese Journal of Applied Physics (01.05.2011)
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Improved Step Coverage of Cu Seed Layers by Magnetic-Field-Assisted Ionized Sputtering
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Published in Japanese Journal of Applied Physics (01.05.2011)
Published in Japanese Journal of Applied Physics (01.05.2011)
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Year of Publication 20.03.2012
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Year of Publication 02.03.2012
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Year of Publication 24.03.2011
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