Characterization of refractory W, WN x , and WSi x films on GaAs using thermoreflectance measurements
Uchitomi, Naotaka, Nagaoka, Masami, Toyoda, Nobuyuki
Published in Journal of applied physics (15.02.1989)
Published in Journal of applied physics (15.02.1989)
Get full text
Journal Article
Characterization of refractory W, WN(x), and WSi(x) films on GaAs using thermoreflectance measurements
UCHITOMI, NAOTAKA, Nagaoka, Masami, Toyoda, Nobuyuki
Published in Journal of applied physics (15.02.1989)
Get full text
Published in Journal of applied physics (15.02.1989)
Journal Article