Plasma processing for advanced microelectronics beyond CMOS
Marchack, N., Buzi, L., Farmer, D. B., Miyazoe, H., Papalia, J. M., Yan, H., Totir, G., Engelmann, S. U.
Published in Journal of applied physics (28.08.2021)
Published in Journal of applied physics (28.08.2021)
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Journal Article
Dissociative adsorption of CCl4 on the Fe3O4(111)-(2 x 2) selvedge of α-Fe2O3(0001)
ADIB, K, MULLINS, D. R, TOTIR, G, CAMILLONE, N. III, FITTS, J. P, RIM, K. T, FLYNN, G. W, OSGOOD, R. M
Published in Surface science (01.02.2003)
Published in Surface science (01.02.2003)
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Journal Article
Chemistry of CCl4 on Fe3O4(111)-(2×2) surfaces in the presence of adsorbed D2O studied by temperature programmed desorption
ADIB, K, TOTIR, G. G, FITTS, J. P, RIM, K. T, MUELLER, T, FLYNN, G. W, JOYCE, S. A, OSGOOD, R. M
Published in Surface science (01.07.2003)
Published in Surface science (01.07.2003)
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Journal Article
X-ray photoelectron spectroscopy and morphological studies of polycrystalline nickel surfaces exposed to anhydrous HF
TOTIR, George G, CHOTTINER, Gary S, GROSS, Christopher L, CHILDS, W. Ves, SCHERSON, Daniel A
Published in Journal of the Electrochemical Society (01.11.2000)
Published in Journal of the Electrochemical Society (01.11.2000)
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Journal Article
Electrofluorination of hexafluorobutanol in anhydrous hydrofluoric acid: Quasi on line mass spectrometry and X-ray photoelectron spectroscopy studies
TOTIR, George G, CHOTTINER, Gary S, GROSS, Christopher L, SCHERSON, Daniel A
Published in Journal of the Electrochemical Society (01.06.2001)
Published in Journal of the Electrochemical Society (01.06.2001)
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Journal Article
Post Ion-Implant Photoresist Removal via Wet Chemical Cleans Combined with Physical Force Pretreatments
Totir, George G., Frank, Martin, Vos, Rita, Arnauts, Sophia, Bearda, Twan, Kenis, Karine, Delande, Martine, Le, QuocToan, Kesters, Els, Vereecke, Guy, Mannaert, Geert, Lux, Marcel, Hoflijk, Ilse, Conard, Thierry, Banerjee, Souvik, Malhouitre, Stephane, Leunissen, Leonardus H.A., Mertens, P.
Published in ECS transactions (28.09.2007)
Published in ECS transactions (28.09.2007)
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Journal Article
Investigation of FinFET Devices for 32nm Technologies and Beyond
Shang, H., Chang, L., Wang, X., Rooks, M., Zhang, Y., To, B., Babich, K., Totir, G., Sun, Y., Kiewra, E., Ieong, M., Haensch, W.
Published in 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers (2006)
Published in 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers (2006)
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Conference Proceeding
Underpotential Deposition of Lithium on Aluminum in Ultrahigh-Vacuum Environments
Li, Lin-Feng, Luo, Yu, Totir, George G., Totir, Dana A., Chottiner, Gary S., Scherson, Daniel A.
Published in The journal of physical chemistry. B (07.01.1999)
Published in The journal of physical chemistry. B (07.01.1999)
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Journal Article
Dissociative adsorption of CCl 4 on the Fe 3O 4(1 1 1)-(2×2) selvedge of α-Fe 2O 3(0 0 0 1)
Adib, K, Mullins, D.R, Totir, G, Camillone, N, Fitts, J.P, Rim, K.T, Flynn, G.W, Osgood, R.M
Published in Surface science (2003)
Published in Surface science (2003)
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Journal Article
Corrigendum to: “Dissociative adsorption of CCl4 on the Fe3O4(1 1 1)-(2 × 2) selvedge of α-Fe2O3(0 0 0 1)” [Surf. Sci. 524 (2003) 113–128]
Adib, K., Mullins, D.R., Totir, G., Camillone III, N., Fitts, J.P., Rim, K.T., Flynn, G.W., Osgood Jr, R.M.
Published in Surface science (01.05.2003)
Published in Surface science (01.05.2003)
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Journal Article
Evaluation of emitter profiles and lateral uniformity on crystalline silicon photovoltaic cells using scanning capacitance microscopy
Kosbar, L, Nxumalo, J, Nalaskowski, J, Hupka, L, Molella, C, Liu, J, Totir, G, Fisher, K, Cotte, J, Hopstaken, M
Published in 2010 35th IEEE Photovoltaic Specialists Conference (01.06.2010)
Published in 2010 35th IEEE Photovoltaic Specialists Conference (01.06.2010)
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Conference Proceeding
Corrigendum to: “Dissociative adsorption of CCl 4 on the Fe 3O 4(1 1 1)-(2 × 2) selvedge of α-Fe 2O 3(0 0 0 1)” [Surf. Sci. 524 (2003) 113–128]
Adib, K., Mullins, D.R., Totir, G., Camillone III, N., Fitts, J.P., Rim, K.T., Flynn, G.W., Osgood Jr, R.M.
Published in Surface science (2003)
Published in Surface science (2003)
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Journal Article
Development and characterization of advanced process technologies for the fabrication of crystalline-Si solar cells
Rao, S S Papa, Fisher, K, Neumayer, D, Qiang Huang, Kwietniak, K, Jun Liu, Vichiconti, J, Nalaskowski, J, Newbury, J, Pyzyna, A, Rossnagel, S, Totir, G, Fuller, N
Published in 2010 35th IEEE Photovoltaic Specialists Conference (01.06.2010)
Published in 2010 35th IEEE Photovoltaic Specialists Conference (01.06.2010)
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Conference Proceeding
Plasma shallow doping and wet removal of depth control cap
Bruce, Robert L, Chan, Kevin K, Khojasteh, Mahmoud, Yan, Hongwen, Goldfarb, Dario L, Totir, George G, Engelmann, Sebastian U, Hopstaken, Marinus, Yamazaki, Masahiro
Year of Publication 30.04.2019
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Year of Publication 30.04.2019
Patent
Wet clean process for removing CxHyFz etch residue
Bruce, Robert L, Zhu, Yu, Papa Rao, Satyavolu S, Khojasteh, Mahmoud, To, Bang N, Joseph, Eric A, Nakamura, Masahiro, Totir, George G, Engelmann, Sebastian U
Year of Publication 01.01.2019
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Year of Publication 01.01.2019
Patent