Three-dimensional Nano-motion System for SPM-based CMM
SAWANO, Hiroshi, GOKAN, Toshimichi, YOSHIOKA, Hayato, SHINNO, Hidenori
Published in Journal of Advanced Mechanical Design, Systems, and Manufacturing (01.01.2010)
Published in Journal of Advanced Mechanical Design, Systems, and Manufacturing (01.01.2010)
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Journal Article
A newly developed STM-based coordinate measuring machine
Sawano, Hiroshi, Gokan, Toshimichi, Yoshioka, Hayato, Shinno, Hidenori
Published in Precision engineering (01.10.2012)
Published in Precision engineering (01.10.2012)
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Journal Article
A newly developed three-dimensional profile scanner with nanometer spatial resolution
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Journal Article
Conference Proceeding
Design and Nanomotion Control of a Noncontact Stage with Squeeze Bearings
Yoshioka, Hayato, Gokan, Toshimichi, Shinno, Hidenori
Published in International journal of automation technology (05.01.2008)
Published in International journal of automation technology (05.01.2008)
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Journal Article