Improving mechanical strength and surface uniformity to prepare high quality thinned 4H-SiC epitaxial wafer using Si-vapor etching technology
Torimi, Satoshi, Ashida, Koji, Yabuki, Norihito, Shinohara, Masato, Sakaguchi, Takuya, Teramoto, Yoji, Nogami, Satoru, Kitabatake, Makoto, Kaneko, Tadaaki
Published in 2016 European Conference on Silicon Carbide & Related Materials (ECSCRM) (15.05.2017)
Published in 2016 European Conference on Silicon Carbide & Related Materials (ECSCRM) (15.05.2017)
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Conference Proceeding
Journal Article
Development of “Si-Vapor Etching” and “Si Vapor Ambient Anneal” in TaC/Ta Composite Materials
Kaneko, Tadaaki, Nogami, Satoru, Yabuki, Norihito, Kitabatake, Makoto, Torimi, Satoshi
Published in Materials Science Forum (24.05.2016)
Published in Materials Science Forum (24.05.2016)
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Journal Article
Evaluation of Polishing-Induced Subsurface Damage of 4H-SiC (0001) by Cross-Sectional Electron Backscattered Diffraction and Synchrotron X-Ray Micro-Diffraction
Ashida, Koji, Dojima, Daichi, Kutsuma, Yasunori, Torimi, Satoshi, Nogami, Satoru, Imai, Yasuhiko, Kimura, Shigeru, Mizuki, Jun-ichiro, Ohtani, Noboru, Kaneko, Tadaaki
Published in MRS advances (01.01.2016)
Published in MRS advances (01.01.2016)
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Journal Article
Rearrangement of Surface Structure of 4o Off-Axis 4H-SiC (0001) Epitaxial Wafer by High Temperature Annealing in Si/Ar Ambient
Yabuki, Norihito, Kitabatake, Makoto, Ashida, Koji, Sudo, Yusuke, Sakaguchi, Takuya, Nogami, Satoru, Dojima, Daichi, Torimi, Satoshi, Kaneko, Tadaaki
Published in Materials science forum (05.06.2018)
Published in Materials science forum (05.06.2018)
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Journal Article
Characterization of pn-Diode Fabricated from Surface Damage-Free 4H-SiC Wafer Using Si-Vapor Etching Process
Senzaki, Junji, Yabuki, Norihito, Kitabatake, Makoto, Sakaguchi, Takuya, Teramoto, Yoji, Nogami, Satoru, Shinohara, Masato, Torimi, Satoshi
Published in Materials science forum (05.06.2018)
Published in Materials science forum (05.06.2018)
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Journal Article
SIC WAFER AND METHOD OF MANUFACTURING THE SAME
NAGAYA MASATAKE, KITAHATA MAKOTO, NOGAMI AKIRA, OKAMOTO TAKESHI, TORIMI SATOSHI, KANDA TAKAHIRO
Year of Publication 30.01.2020
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Year of Publication 30.01.2020
Patent