증착 챔버를 위한 가스 분배 세라믹 가열기
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Year of Publication 28.07.2022
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Gas distribution ceramic heater for deposition chamber
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GAS DISTRIBUTION CERAMIC HEATER FOR DEPOSITION CHAMBER
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Year of Publication 10.06.2021
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GAS DISTRIBUTION CERAMIC HEATER FOR DEPOSITION CHAMBER
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Year of Publication 10.06.2021
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Year of Publication 10.06.2021
Patent
Gas distribution ceramic heater for deposition chamber
PURATHE, VINOD KONDA, LEI, PING-YAN, KOPPA, MANJUNATHA, YUAN, XIAOXIONG, WU, DIEN-YEH, RAVI, JALLEPALLY, TOORIHAL, AMBARISH, YADAMANE, SANDESH
Year of Publication 01.08.2021
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Year of Publication 01.08.2021
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