A new and simple probe-based method for preventing charging in focused-ion-beam micro-sampling
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Published in Microelectronic engineering (01.03.2005)
Published in Microelectronic engineering (01.03.2005)
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Conference Proceeding
CHARGED PARTICLE BEAM DEVICE
MURAKI Ayana, SATO Makoto, ASAHATA Tatsuya, TOMIMATSU Satoshi, HIGASHI Yoshinori
Year of Publication 02.08.2024
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Year of Publication 02.08.2024
Patent
Development of Automated Micro-Sampling System and Application to Semiconductor Devices
Sato, Takahiro, Aizawa, Yuka, Suzuki, Masato, Tomimatsu, Satoshi, Katane, Junich
Published in Microscopy and microanalysis (01.08.2018)
Published in Microscopy and microanalysis (01.08.2018)
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Journal Article