Alignment system and method and device manufactured thereby
TOLSMA HOITE PIETER T, SIMONS HUBERTUS J.G, LAM PUI L, BOGERS ROLAND ADRIANUS E.M, HULSHOF BERNARDUS J.A, NAVARRO Y. KOREN RAMON, EDART REMI D.M
Year of Publication 17.11.2005
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Year of Publication 17.11.2005
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Alignment systems and methods for lithographic systems
TOLSMA HOITE PIETER T, HUIJBREGTSE JEROEN, BURGHOORN JACOBUS, SCHETS SICCO I, VAN HORSSEN HERMANUS G, JEUNINK ANDRE B, MEGENS HENRY, VAN BILSEN FRANCISCUS B.M, SIMONS HUBERTUS JOHANNES G, SCHUURHUIS JOHNY R, DUNBAR ALLAN R, KOREN RAMON N.Y, VAN HAREN RICHARD JOHANNES F, LEE BRIAN Y.B, HINNEN PAUL C
Year of Publication 04.05.2006
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Year of Publication 04.05.2006
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Lithographic apparatus, sensing system assembly and method of measuring pellicle deformation
MOEST, BEARRACH, SCHOUTEN, CHRISTINE HENRIETTE, TOLSMA, HOITE PIETER THEODOOR, HUANG, YANG-SHAN, VAN DER MEULEN, STAN HENRICUS, VAN DEN BRINK, ENNO, VAN BOKHOVEN, LAURENTIUS JOHANNES ADRIANUS, LA TORRE, FEDERICO, JEUNINK, ANDRE BERNARDUS, KEIJ, STEFAN CAROLUS JACOBUS ANTONIUS
Year of Publication 11.09.2020
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Year of Publication 11.09.2020
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리소그래피 방법
JEUNINK ANDRE BERNARDUS, HUANG YANG SHAN, MOEST BEARRACH, VAN DER MEULEN STAN HENRICUS, TOLSMA HOITE PIETER THEODOOR, VAN DEN BRINK ENNO, SCHOUTEN CHRISTINE HENRIETTE, VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS, LA TORRE FEDERICO, KEIJ STEFAN CAROLUS JACOBUS ANTONIUS
Year of Publication 27.03.2019
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Year of Publication 27.03.2019
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LITHOGRAPHIC METHOD
JEUNINK ANDRE BERNARDUS, MOEST BEARRACH, VAN DER MEULEN STAN HENRICUS, TOLSMA HOITE PIETER THEODOOR, VAN DEN BRINK ENNO, SCHOUTEN CHRISTINE HENRIETTE, VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS, LA TORRE FEDERICO, HUANG YANG-SHAN, KEIJ STEFAN CAROLUS JACOBUS ANTONIUS
Year of Publication 15.03.2019
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Year of Publication 15.03.2019
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Lithographic method
MOEST, BEARRACH, SCHOUTEN, CHRISTINE HENRIETTE, TOLSMA, HOITE PIETER THEODOOR, HUANG, YANG-SHAN, VAN DER MEULEN, STAN HENRICUS, VAN DEN BRINK, ENNO, VAN BOKHOVEN, LAURENTIUS JOHANNES ADRIANUS, LA TORRE, FEDERICO, JEUNINK, ANDRE BERNARDUS, KEIJ, STEFAN CAROLUS JACOBUS ANTONIUS
Year of Publication 16.02.2018
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Year of Publication 16.02.2018
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Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
KUIPER, JOHANNES MARIA, VAN DE LAAK, RON, VAN DER ZOUW, GERBRAND, KIVITS, KOEN, TOLSMA, HOITE PIETER THEODOOR, KOK, HAICO VICTOR
Year of Publication 21.09.2011
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Year of Publication 21.09.2011
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Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
KUIPER, JOHANNES MARIA, VAN DE LAAK, RON, VAN DER ZOUW, GERBRAND, KIVITS, KOEN, TOLSMA, HOITE PIETER THEODOOR, KOK, HAICO VICTOR
Year of Publication 01.07.2006
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Year of Publication 01.07.2006
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Lithographic apparatus with alignment subsystem, device manufacturing method using alignment, and alignment structure
LEVASIER, LEON MARTIN, SETIJA, IRWAN DANI, DIRNSTORFER, INGO, TOLSMA, HOITE PIETER THEODOOR, PELLEMANS, HENRICUS PETRUS MARIA, KRUIJSWIJK, STEFAN GEERTE, DEN BOEF, ARIE JEFFREY, JEUNINK, ANDRE BERNARDUS
Year of Publication 16.11.2004
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Year of Publication 16.11.2004
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LITHOGRAPHY APPARATUS COMPRISING ALIGNMENT SUBSYSTEM, PREPARATION METHOD OF DEVICE USING ALIGNING AND ALIGNMENT STRUCTURE TO IMPROVE CAPTURE RANGE OF PERIODIC ALIGNMENT SYSTEM AND ROBUSTNESS
LEVASIER LEON MARTIN, JEUNINK ANDRE BERNARDUS, DEN BOEF ARIE JEFFREY, DIRNSTORFER INGO, TOLSMA HOITE PIETER THEODOOR, SETIJA IRWAN DANI, KRUIJSWIJK STEFAN GEERTE, PELLEMANS HENRICUS PETRUS MARIA
Year of Publication 26.06.2004
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Year of Publication 26.06.2004
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ALIGNMENT SYSTEM FOR LITHOGRAPHIC APPARATUS AND ALIGNING METHOD THEREOF
HUIJBREGTSE JEROEN, VAN BILSEN FRANCISCUS BERNARDUS MARIA, VAN HAREN RICHARD JOHANNES FRANCISCUS, LEE YOUNG BOK, TOLSMA HOITE PIETER THEODOOR, BURGHOORN JACOBUS, SIMONS HUBERTUS JOHANNES GERTRUDUS, MEGENS HENRY, JEUNINK ANDRE BERNARDUS, SCHETS SICCO IAN, DUNBAR ALLAN REUBEN, HINNEN PAUL CHRISTIAAN, SCHUURHUIS JOHNY RUTGER, NAVARROY KOREN RAMON, VAN HORSSEN HERMANUS GERARDUS
Year of Publication 26.03.2004
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Year of Publication 26.03.2004
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