Search Results - "TOLANI VIKRAM" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

고속 및 퍼지 패턴 그룹화

고속 및 퍼지 패턴 그룹화

by JIAO JING, TOLANI VIKRAM, LIAO KANGJIA, HU CHANGQING
Year of Publication 14.03.2024

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Patent

극자외선 패턴 마스크 상의 인쇄가능한 결함을 감소시키기 위한 시스템 및 방법

극자외선 패턴 마스크 상의 인쇄가능한 결함을 감소시키기 위한 시스템 및 방법

by TOLANI VIKRAM, ZHANG YAO, YANG XIAOCHUN
Year of Publication 13.06.2022

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Patent

극자외선 포토마스크 상에서 검출되는 결함의 처리

극자외선 포토마스크 상에서 검출되는 결함의 처리

by TOLANI VIKRAM, SATAKE MASAKI, SOUSA WESTON
Year of Publication 29.04.2021

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Patent

Fast and fuzzy pattern grouping

Fast and fuzzy pattern grouping

by HU Changqing, LIAO Kangjia, JIAO Jing, TOLANI Vikram
Year of Publication 01.01.2024

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Patent

Inverse Lithography Technology (ILT) Enabled Source Mask Optimization (SMO)

Inverse Lithography Technology (ILT) Enabled Source Mask Optimization (SMO)

by Pang, Linyong, Xiao, Guangming, Tolani, Vikram, Hu, Peter, Cecil, Tom, Dam, Thuc, Baik, Ki-Ho, Gleason, Bob
Published in ECS transactions (06.03.2009)

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Journal Article

System and method for reducing printable defects on extreme ultraviolet pattern masks

System and method for reducing printable defects on extreme ultraviolet pattern masks

by Tolani, Vikram, Yang, Xiaochun, Zhang, Yao
Year of Publication 14.09.2021

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Patent

From Computational Lithography to Computational Inspection: Inverse Lithography Technology (ILT) and Inverse Inspection Technology (IIT)

From Computational Lithography to Computational Inspection: Inverse Lithography Technology (ILT) and Inverse Inspection Technology (IIT)

by Pang, Linyong, Peng, Danping, Hu, Peter, Chen, Dongxue, Cecil, Tom, He, Lin, Xiao, Guangming, Tolani, Vikram, Dam, Thuc, Baik, KiHo, Gleason, Bob
Published in ECS transactions (01.01.2010)

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Journal Article

FAST AND FUZZY PATTERN GROUPING

FAST AND FUZZY PATTERN GROUPING

by Tolani, Vikram, Hu, Changqing, Liao, Kangjia, Jiao, Jing
Year of Publication 19.01.2023

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Patent

FAST AND FUZZY PATTERN GROUPING

FAST AND FUZZY PATTERN GROUPING

by HU, Changqing, JIAO, Jing, LIAO, Kangjia, TOLANI, Vikram
Year of Publication 19.01.2023

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Patent

SYSTEM AND METHOD FOR REDUCING PRINTABLE DEFECTS ON EXTREME ULTRAVIOLET PATTERN MASKS

SYSTEM AND METHOD FOR REDUCING PRINTABLE DEFECTS ON EXTREME ULTRAVIOLET PATTERN MASKS

by Tolani, Vikram, Yang, Xiaochun, Zhang, Yao
Year of Publication 15.04.2021

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Patent

SYSTEM AND METHOD FOR REDUCING PRINTABLE DEFECTS ON EXTREME ULTRAVIOLET PATTERN MASKS

SYSTEM AND METHOD FOR REDUCING PRINTABLE DEFECTS ON EXTREME ULTRAVIOLET PATTERN MASKS

by YANG, Xiaochun, ZHANG, Yao, TOLANI, Vikram
Year of Publication 15.04.2021

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Patent

Dispositioning defects detected on extreme ultraviolet photomasks

Dispositioning defects detected on extreme ultraviolet photomasks

by Tolani, Vikram, Satake, Masaki, Sousa, Weston L
Year of Publication 15.12.2020

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Patent

DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS

DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS

by Tolani, Vikram, Satake, Masaki, Sousa, Weston L
Year of Publication 26.03.2020

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Patent

DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS

DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS

by SATAKE, Masaki, TOLANI, Vikram, SOUSA, Weston
Year of Publication 26.03.2020

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Patent

DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS

DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS

by TOLANI, VIKRAM, SOUSA, WESTON L, SATAKE, MASAKI
Year of Publication 01.04.2023

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Patent

System and method for reducing printable defects on extreme ultraviolet pattern masks

System and method for reducing printable defects on extreme ultraviolet pattern masks

by TOLANI, VIKRAM, ZHANG, YAO, YANG, XIAOUN
Year of Publication 01.08.2021

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Patent

DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS

DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS

by TOLANI VIKRAM, SATAKE MASAKI, SOUSA WESTON
Year of Publication 27.04.2021

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Patent

Dispositioning defects detected on extreme ultraviolet photomasks

Dispositioning defects detected on extreme ultraviolet photomasks

by TOLANI, VIKRAM, SOUSA, WESTON L, SATAKE, MASAKI
Year of Publication 01.07.2020

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Patent

Fast and fuzzy pattern grouping

Fast and fuzzy pattern grouping

by TOLANI, VIKRAM, JIAO, JING, LIAO, KANG-JIA, HU, CHANGQING
Year of Publication 01.05.2023

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Patent

Photo-mask acceptance technique

Photo-mask acceptance technique

by TOLANI VIKRAM, PANG LINYONG, PENG DANPING
Year of Publication 04.06.2013

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Patent