Deposition of SiO2 and Ta2O5 films by electron-beam-excited plasma ion plating
Toki, Kazuyuki, Kusakabe, Kazutoshi, Odani, Tadayoshi, Kobuna, Sadatoshi, Shimizu, Yasushi
Published in Thin solid films (01.08.1996)
Published in Thin solid films (01.08.1996)
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Consistent Theory of Sputtering of Solid Targets by Ion Bombardment Using Power Potential Law
Kanaya, Koichi, Hojou, Kiichi, Koga, Kikuo, Toki, Kazuyuki
Published in Japanese Journal of Applied Physics (01.01.1973)
Published in Japanese Journal of Applied Physics (01.01.1973)
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Journal Article