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APPARATUS AND METHOD FOR ELECTROSTATICALLY CLAMPING A SUBSTRATE

APPARATUS AND METHOD FOR ELECTROSTATICALLY CLAMPING A SUBSTRATE

by DE VRIES, Sjoerd, Frans, VAN EMPEL, Tjarko, Adriaan, Rudolf, REIJNEN, Martinus, Cornelis, JANSEN, Maarten, Mathijs, Marinus
Year of Publication 19.06.2024

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Patent

Electrostatic clamp

Electrostatic clamp

by Van Empel Tjarko Adriaan Rudolf
Year of Publication 27.09.2016

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Patent

ELECTROSTATIC CLAMP

ELECTROSTATIC CLAMP

by VAN EMPEL TJARKO ADRIAAN RUDOLF
Year of Publication 05.02.2015

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Patent

Dichroic mirror, method for manufacturing a dichroic mirror, lithographic apparatus, semiconductor device and method of manufacturing therefor

Dichroic mirror, method for manufacturing a dichroic mirror, lithographic apparatus, semiconductor device and method of manufacturing therefor

by VAN EMPEL TJARKO ADRIAAN RUDOLF
Year of Publication 28.05.2013

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Patent

Lithographic apparatus and device manufacturing method incorporating a pressure shield

Lithographic apparatus and device manufacturing method incorporating a pressure shield

by Van Empel, Tjarko Adriaan Rudolf
Year of Publication 10.07.2012

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Patent

Lithographic apparatus and device manufacturing method incorporating a pressure shield

Lithographic apparatus and device manufacturing method incorporating a pressure shield

by VAN EMPEL TJARKO ADRIAAN RUDOLF
Year of Publication 10.07.2012

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Patent

ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING AN ELECTROSTATIC CLAMP

ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING AN ELECTROSTATIC CLAMP

by VISSER, Raimond, YANG, Zongquan, VAN EMPEL, Tjarko, Adriaan, Rudolf, SIJBEN, Anko, Jozef, Cornelus, FRANSSEN, Johannes, Hendrikus, Gertrudis, BRALS, Albert, RIJPMA, Albert, Pieter
Year of Publication 06.11.2019

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Patent

Lithographic apparatus with flexible transportation line having varying stiffness between two objects

Lithographic apparatus with flexible transportation line having varying stiffness between two objects

by Van Empel Tjarko Adriaan Rudolf, Jansen Norbert Erwin Therenzo, Houkes Martijn
Year of Publication 19.09.2017

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Patent

Electrostatic clamp

Electrostatic clamp

by VAN EMPEL, TJARKO ADRIAAN RUDOLF
Year of Publication 01.02.2017

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Patent

Lithographic apparatus and position measuring method

Lithographic apparatus and position measuring method

by EUSSEN, EMIEL JOZEF MELANIE, VAN EMPEL, TJARKO ADRIAAN RUDOLF, PRIL, WOUTER ONNO
Year of Publication 14.09.2016

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Patent

DICHROIC MIRROR, METHOD FOR MANUFACTURING A DICHROIC MIRROR, LITHOGRAPHIC APPARATUS, SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREFOR

DICHROIC MIRROR, METHOD FOR MANUFACTURING A DICHROIC MIRROR, LITHOGRAPHIC APPARATUS, SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREFOR

by VAN EMPEL TJARKO ADRIAAN RUDOLF
Year of Publication 19.11.2009

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Patent

DICHROIC MIRROR, METHOD OF MANUFACTURING THE SAME, AND LITHOGRAPHY DEVICE, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE DEVICES

DICHROIC MIRROR, METHOD OF MANUFACTURING THE SAME, AND LITHOGRAPHY DEVICE, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE DEVICES

by VAN EMPEL TJARKO ADRIAAN RUDOLF
Year of Publication 19.11.2009

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Patent

Dichroic mirror, method for manufacturing a dichroic mirror, lithographic apparatus, semiconductor device and method of manufacturing therefor

Dichroic mirror, method for manufacturing a dichroic mirror, lithographic apparatus, semiconductor device and method of manufacturing therefor

by TJARKO ADRIAAN RUDOLF VAN EMPEL
Year of Publication 03.11.2009

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Patent

Lithographic Apparatus and Device Manufacturing Method Incorporating a Pressure Shield

Lithographic Apparatus and Device Manufacturing Method Incorporating a Pressure Shield

by VAN EMPEL TJARKO ADRIAAN RUDOLF
Year of Publication 30.07.2009

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Patent

Lithographic apparatus and device manufacturing method incorporating a pressure shield

Lithographic apparatus and device manufacturing method incorporating a pressure shield

by VAN EMPEL TJARKO ADRIAAN RUDOLF
Year of Publication 17.02.2009

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Patent

Lithographic apparatus and device manufacturing method incorporating a pressure shield

Lithographic apparatus and device manufacturing method incorporating a pressure shield

by Van Empel, Tjarko Adriaan Rudolf
Year of Publication 17.02.2009

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Patent

LITHOGRAPHIC APPARATUS WITH BUILT-IN PRESSURE SHIELD, AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS WITH BUILT-IN PRESSURE SHIELD, AND DEVICE MANUFACTURING METHOD

by VAN EMPEL TJARKO ADRIAAN RUDOLF
Year of Publication 05.07.2007

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by Rijpma, Albert Pieter, Van Empel, Tjarko Adriaan Rudolf
Year of Publication 24.07.2012

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by RIJPMA ALBERT PIETER, VAN EMPEL TJARKO ADRIAAN RUDOLF
Year of Publication 24.07.2012

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Patent

Lithographic apparatus with temperature sensor and device manufacturing method

Lithographic apparatus with temperature sensor and device manufacturing method

by Van Empel, Tjarko Adriaan Rudolf, Schaareman, Paulus Bartholomeus Johannes
Year of Publication 06.12.2011

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Patent

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