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Year of Publication 01.09.2012
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Year of Publication 16.07.2009
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Year of Publication 16.07.2009
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METHOD AND SYSTEM FOR DETERMINING A SUPPRESSION FACTOR OF A SUPPRESSION SYSTEM AND A LITHOGRAPHIC APPARATUS
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Year of Publication 14.05.2009
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Year of Publication 09.04.2009
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Year of Publication 09.04.2009
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Lithographic apparatus with temperature sensor and device manufacturing method
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Year of Publication 24.08.2009
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Year of Publication 24.08.2009
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MODULE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION
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Year of Publication 26.02.2009
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Year of Publication 26.02.2009
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Using unflatness information of the substrate table or mask table for decreasing overlay
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Year of Publication 03.07.2007
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Year of Publication 03.07.2007
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Using unflatness information of the substrate table or mask table for decreasing overlay
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Year of Publication 03.07.2007
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Year of Publication 03.07.2007
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Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp
RIJPMA, ALBERT PIETER, VAN EMPEL, TJARKO ADRIAAN RUDOLF, FRANSSEN, JOHANNES HENDRIKUS GERTRUDIS, BRALS, ALBERT, SIJBEN, ANKO JOZEF CORNELUS, VISSER, RAIMOND, YANG, ZONGQUAN
Year of Publication 21.07.2014
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Year of Publication 21.07.2014
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