Search Results - "TJANDRA AGUS" :: K.UTB vyhledávací portál

REMOTE PLASMA OXIDATION CHAMBER

by OLSEN CHRISTOPHER S, SHONO ERIC KIHARA, PRASAD CHAITANYA A, TJANDRA AGUS SOFIAN, HAWRYLCHAK LARA
Year of Publication 07.04.2023

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METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSING VOLUME OF A PROCESSING CHAMBER

by OLSEN CHRISTOPHER S, PANDEY VISHWAS KUMAR, SHONO ERIC KIHARA, KIM TAEWAN, TJANDRA AGUS SOFIAN, LO HANSEL, SHAH KARTIK, KAUFMAN OSBORN TOBIN
Year of Publication 18.12.2023

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DOGBONE INLET CONE PROFILE FOR REMOTE PLASMA OXIDATION CHAMBER

by OLSEN CHRISTOPHER S, PANDEY VISHWAS KUMAR, SHONO ERIC KIHARA, RAJU HEMANTHA, TJANDRA AGUS SOFIAN, LO HANSEL, SHAH KARTIK
Year of Publication 17.10.2022

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IMPROVED SIDE INJECT NOZZLE DESIGN FOR PROCESSING CHAMBER

by RIPLEY MARTIN J, TJANDRA AGUS SOFIAN
Year of Publication 07.11.2017

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APPARATUS AND METHOD FOR SELECTIVE OXIDATION AT LOWER TEMPERATURE USING REMOTE PLASMA SOURCE

by OLSEN CHRISTOPHER S, ROGERS MATTHEW SCOTT, TJANDRA AGUS S, PAN HENG
Year of Publication 14.01.2020

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원격 플라즈마 산화 챔버

by OLSEN CHRISTOPHER S, SHONO ERIC KIHARA, PRASAD CHAITANYA A, TJANDRA AGUS SOFIAN, HAWRYLCHAK LARA
Year of Publication 09.01.2020

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원격 플라즈마 산화 챔버를 위한 도그본 유입구 원뿔형 프로파일

by OLSEN CHRISTOPHER S, PANDEY VISHWAS KUMAR, SHONO ERIC KIHARA, RAJU HEMANTHA, TJANDRA AGUS SOFIAN, LO HANSEL, SHAH KARTIK
Year of Publication 02.09.2020

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개선된 가스 유동을 처리 챔버의 처리 용적에 공급하기 위한 방법 및 장치

by OLSEN CHRISTOPHER S, PANDEY VISHWAS KUMAR, SHONO ERIC KIHARA, KIM TAEWAN, TJANDRA AGUS SOFIAN, LO HANSEL, SHAH KARTIK, KAUFMAN OSBORN TOBIN
Year of Publication 02.08.2021

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개선된 라디칼 농도들을 위한 측면 주입부 설계들

by OLSEN CHRISTOPHER S, SHONO ERIC KIHARA, PANDEY VISHWAS KUMAR, KIM TAEWAN, TJANDRA AGUS SOFIAN, LO HANSEL, KAUFMAN OSBORN TOBIN
Year of Publication 02.09.2020

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METHODS AND APPARATUS FOR SELECTIVE OXIDATION OF A SUBSTRATE

by OLSEN CHRISTOPHER S, TJANDRA AGUS, HAWRYLCHAK LARA, SWENBERG JOHANES
Year of Publication 26.11.2014

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GAS INJECTION APPARATUS AND SUBSTRATE PROCESS CHAMBER INCORPORATING SAME

by OLSEN CHRISTOPHER S, TJANDRA AGUS SOFIAN, KELKAR UMESH M, GHOSH KALYANJIT
Year of Publication 14.10.2015

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THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION

by NAVASCA ROBERT, TAM NORMAN, LERNER ALEXANDER N, TSENG MING KUEI (MICHAEL), TJANDRA AGUS, SANGAM KEDARNATH, RAMAMURTHY SUNDAR, YOKOTA YOSHITAKA, BEHDJAT MEDHRAN
Year of Publication 26.11.2015

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Silicon germanium selective oxidation process

by Tjandra, Agus Sofian
Year of Publication 24.03.2020

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THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION

by NAVASCA ROBERT, TAM NORMAN, LERNER ALEXANDER N, TSENG MING KUEI (MICHAEL), TJANDRA AGUS, SANGAM KEDARNATH, RAMAMURTHY SUNDAR, YOKOTA YOSHITAKA, BEHDJAT MEDHRAN
Year of Publication 09.06.2015

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