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Year of Publication 25.07.2024
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Year of Publication 25.07.2024
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결함 기반의 프로세스 윈도우에 기초하여 시뮬레이션 프로세스를 캘리브레이팅하기 위한 방법
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Year of Publication 20.09.2022
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Year of Publication 20.09.2022
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디바이스의 제조 프로세스에서의 방법, 비-일시적 컴퓨터-판독가능 매체 및 이러한 방법을 수행하기 위한 시스템
KIERS ANTOINE GASTON MARIE, DILLEN HERMANUS ADRIANUS, WANG TE SHENG, CHEN TZU CHAO, TIMOSHKOV VADIM YOURIEVICH, TEL WIM TJIBBO, ZHANG YICHEN
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Year of Publication 03.06.2021
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Method of manufacturing devices
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Year of Publication 23.07.2024
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Year of Publication 23.07.2024
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METHOD FOR CALIBRATING SIMULATION PROCESS BASED ON DEFECT-BASED PROCESS WINDOW
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Year of Publication 09.03.2023
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Year of Publication 09.03.2023
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A METHOD IN THE MANUFACTURING PROCESS OF A DEVICE, A NON-TRANSITORY COMPUTER-READABLE MEDIUM AND A SYSTEM CONFIGURED TO PERFORM THE METHOD
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Year of Publication 13.05.2020
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Year of Publication 13.05.2020
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METHOD IN THE MANUFACTURING PROCESS OF A DEVICE, A NON-TRANSITORY COMPUTER-READABLE MEDIUM AND A SYSTEM CONFIGURED TO PERFORM THE METHOD
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Year of Publication 30.12.2021
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Year of Publication 30.12.2021
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A METHOD IN THE MANUFACTURING PROCESS OF A DEVICE, A NON-TRANSITORY COMPUTER-READABLE MEDIUM AND A SYSTEM CONFIGURED TO PERFORM THE METHOD
KIERS, Antoine, Gaston, Marie, TIMOSHKOV, Vadim Yourievich, TEL, Wim, Tjibbo, ZHANG, Yichen, WANG, Te-Sheng, DILLEN, Hermanus, Adrianus, CHEN, Tzu-Chao
Year of Publication 15.09.2021
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Year of Publication 15.09.2021
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METHOD FOR CALIBRATING SIMULATION PROCESS BASED ON DEFECT-BASED PROCESS WINDOW
SLACHTER, Abraham, TIMOSHKOV, Vadim Yourievich, DILLEN, Hermanus, HUNSCHE, Stefan, WANG, Fuming, VAN LARE, Marie-Claire, COLINA, Luis, RAGHUNATHAN, Sudharshanan, VAN INGEN SCHENAU, Koenraad, JIANG, Aiqin, KOOIMAN, Marleen
Year of Publication 26.08.2021
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Year of Publication 26.08.2021
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A METHOD IN THE MANUFACTURING PROCESS OF A DEVICE, A NON-TRANSITORY COMPUTER-READABLE MEDIUM AND A SYSTEM CONFIGURED TO PERFORM THE METHOD
KIERS, Antoine, TIMOSHKOV, Vadim Yourievich, DILLEN, Hermanus, ZHANG, Yichen, WANG, Te-Sheng, TEL, Wim, CHEN, Tzu-Chao
Year of Publication 14.05.2020
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Year of Publication 14.05.2020
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METHOD OF MANUFACTURING DEVICES
SLACHTER, Abraham, TIMOSHKOV, Vadim Yourievich, HASTINGS, Simon Philip Spencer, SLOTBOOM, Daan Maurits, MENCHTCHIKOV, Boris, ZHANG, Youping, TEL, Wim Tjibbo, VAN DER STRATEN, Koen Wilhelmus Cornelis Adrianus, LIN, Chenxi, ZOU, Yi, TABERY, Cyrus Emil, CHENG, Yana, GENIN, Maxime Philippe Frederic
Year of Publication 23.12.2021
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Year of Publication 23.12.2021
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A method in the manufacturing process of a device, a non-transitory computer-readable medium and a system configured to perform the method
TIMOSHKOV, VADIM YOURIEVICH, KIERS, ANTOINE GASTON MARIE, CHEN, TZUAO, DILLEN, HERMANUS ADRIANUS, TEL, WIM TJIBBO, ZHANG, YIN, WANG, TE-SHENG
Year of Publication 01.03.2024
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Year of Publication 01.03.2024
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Methods for calibrating simulation process and related non-transitory computer-readable medium
TIMOSHKOV, VADIM YOURIEVICH, COLINA, LUIS ALBERTO COLINA SANTAMARIA, SLACHTER, ABRAHAM, DILLEN, HERMANUS ADRIANUS, KOOIMAN, MARLEEN, JIANG, AIQIN, RAGHUNATHAN, SUDHARSHANAN, VAN LARE, MARIE-CLAIRE, HUNSCHE, STEFAN, VAN INGEN SCHENAU, KOENRAAD, WANG, FU-MING
Year of Publication 01.04.2024
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Year of Publication 01.04.2024
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Methods for calibrating simulation process and related non-transitory computer-readable medium
TIMOSHKOV, VADIM YOURIEVICH, COLINA, LUIS ALBERTO COLINA SANTAMARIA, WANG, FUMING, SLACHTER, ABRAHAM, DILLEN, HERMANUS ADRIANUS, KOOIMAN, MARLEEN, JIANG, AIQIN, RAGHUNATHAN, SUDHARSHANAN, VAN LARE, MARIE-CLAIRE, HUNSCHE, STEFAN, VAN INGEN SCHENAU, KOENRAAD
Year of Publication 01.12.2023
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Year of Publication 01.12.2023
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Methods for adjusting a process window and related non-transitory computer-readable medium
TIMOSHKOV, VADIM YOURIEVICH, COLINA, LUIS ALBERTO COLINA SANTAMARIA, SLACHTER, ABRAHAM, DILLEN, HERMANUS ADRIANUS, KOOIMAN, MARLEEN, JIANG, AIQIN, RAGHUNATHAN, SUDHARSHANAN, VAN LARE, MARIE-CLAIRE, HUNSCHE, STEFAN, VAN INGEN SCHENAU, KOENRAAD, WANG, FU-MING
Year of Publication 16.02.2023
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Year of Publication 16.02.2023
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Methods for adjusting a process window and related non-transitory computer-readable medium
TIMOSHKOV, VADIM YOURIEVICH, COLINA, LUIS ALBERTO COLINA SANTAMARIA, WANG, FUMING, SLACHTER, ABRAHAM, DILLEN, HERMANUS ADRIANUS, KOOIMAN, MARLEEN, JIANG, AIQIN, RAGHUNATHAN, SUDHARSHANAN, VAN LARE, MARIE-CLAIRE, HUNSCHE, STEFAN, VAN INGEN SCHENAU, KOENRAAD
Year of Publication 01.12.2022
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Year of Publication 01.12.2022
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A METHOD IN THE MANUFACTURING PROCESS OF A DEVICE, A NON-TRANSITORY COMPUTER-READABLE MEDIUM AND A SYSTEM CONFIGURED TO PERFORM THE METHOD
KIERS ANTOINE GASTON MARIE, DILLEN HERMANUS ADRIANUS, CHEN TZUAO, TIMOSHKOV VADIM YOURIEVICH, TEL WIM TJIBBO, ZHANG YICHEN, WANG TE-SHENG
Year of Publication 15.06.2021
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Year of Publication 15.06.2021
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