Device scaling effect on the spectral-directional absorptance of wafer’s front side
Fu, Kang, Chen, Yu-Bin, Hsu, Pei-feng, Zhang, Zhuomin M., Timans, Paul J.
Published in International journal of heat and mass transfer (01.09.2008)
Published in International journal of heat and mass transfer (01.09.2008)
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Journal Article
Uniformity optimization techniques for rapid thermal processing systems
Acharya, N., Kirtikar, V., Shooshtarian, S., Hong Doan, Timans, P.J., Balakrishnan, K.S., Knutson, K.L.
Published in IEEE transactions on semiconductor manufacturing (01.08.2001)
Published in IEEE transactions on semiconductor manufacturing (01.08.2001)
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Journal Article
Conference Proceeding
Activation trends in millisecond annealing of heavy n-type doping of silicon
Timans, Paul J.
Published in 2018 18th International Workshop on Junction Technology (IWJT) (01.03.2018)
Published in 2018 18th International Workshop on Junction Technology (IWJT) (01.03.2018)
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Conference Proceeding