Evaluation of platinum as a structural thin film material for RF-MEMS devices
Ekkels, P, Rottenberg, X, Puers, R, Tilmans, H A C
Published in Journal of micromechanics and microengineering (01.06.2009)
Published in Journal of micromechanics and microengineering (01.06.2009)
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Journal Article
Piezoelectric transduction of flexural modes in pre-stressed microbeam resonators
Torri, G B, Janssen, N M A, Zeng, Z, Rottenberg, X, Karabacak, D M, Vandecasteele, M, Hoof, C Van, Puers, R, Tilmans, H A C
Published in Journal of micromechanics and microengineering (01.08.2014)
Published in Journal of micromechanics and microengineering (01.08.2014)
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Journal Article
Mechanical and electrical characterization of BCB as a bond and seal material for cavities housing (RF-)MEMS devices
Jourdain, A, De Moor, P, Baert, K, De Wolf, I, Tilmans, H A C
Published in Journal of micromechanics and microengineering (01.07.2005)
Published in Journal of micromechanics and microengineering (01.07.2005)
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Journal Article
Conference Proceeding
An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology
Rottenberg, X, Brebels, S, Ekkels, P, Czarnecki, P, Nolmans, P, Mertens, R P, Nauwelaers, B, Puers, R, De Wolf, I, De Raedt, W, Tilmans, H A C
Published in Journal of micromechanics and microengineering (01.07.2007)
Published in Journal of micromechanics and microengineering (01.07.2007)
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Journal Article
Conference Proceeding
Stress release structures for actuator beams with a stress gradient
Klaasse, G, Puers, R, Tilmans, H A C
Published in Journal of micromechanics and microengineering (01.10.2007)
Published in Journal of micromechanics and microengineering (01.10.2007)
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Journal Article
Study of electrical breakdown and secondary pull-in failure modes for NEM relays
Ramezani, M, Severi, S, Tilmans, H A C, De Meyer, K
Published in Journal of micromechanics and microengineering (01.01.2017)
Published in Journal of micromechanics and microengineering (01.01.2017)
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Journal Article
Modal analysis based equivalent circuit model and its verification for a single cMUT cell
Mao, S P, Rottenberg, X, Rochus, V, Czarnecki, P, Helin, P, Severi, S, Nauwelaers, B, Tilmans, H A C
Published in Journal of micromechanics and microengineering (01.03.2017)
Published in Journal of micromechanics and microengineering (01.03.2017)
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Journal Article
Filter-through device: a distributed RF-MEMS capacitive series switch
Rottenberg, X, Mertens, R P, Nauwelaers, B, De Raedt, W, Tilmans, H A C
Published in Journal of micromechanics and microengineering (01.07.2005)
Published in Journal of micromechanics and microengineering (01.07.2005)
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Journal Article
Conference Proceeding
MEMS packaging and reliability: An undividable couple
Tilmans, H.A.C., De Coster, J., Helin, P., Cherman, V., Jourdain, A., De Moor, P., Vandevelde, B., Pham, N.P., Zekry, J., Witvrouw, A., De Wolf, I.
Published in Microelectronics and reliability (01.09.2012)
Published in Microelectronics and reliability (01.09.2012)
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Journal Article
Conference Proceeding
Acoustic meta-materials in MEMS BAW resonators
Rottenberg, X., Jansen, R., Van Hoof, C., Tilmans, H. A. C.
Published in Applied physics. A, Materials science & processing (01.06.2011)
Published in Applied physics. A, Materials science & processing (01.06.2011)
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Journal Article
Compact cavity resonators using high impedance surfaces
Dancila, D., Rottenberg, X., Focant, N., Tilmans, H. A. C., De Raedt, W., Huynen, I.
Published in Applied physics. A, Materials science & processing (01.06.2011)
Published in Applied physics. A, Materials science & processing (01.06.2011)
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Journal Article
Materials issues in the processing, the operation and the reliability of MEMS
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Conference Proceeding
The influence of mechanical shock on the operation of electrostatically driven RF-MEMS switches
Coster, J De, Tilmans, H A C, Beek, J T M van, Rijks, Th G S M, Puers, R
Published in Journal of micromechanics and microengineering (01.09.2004)
Published in Journal of micromechanics and microengineering (01.09.2004)
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Journal Article
Conference Proceeding
RF-power: driver for electrostatic RF-MEMS devices
Rottenberg, X, Brebels, S, Raedt, W De, Nauwelaers, B, Tilmans, H A C
Published in Journal of micromechanics and microengineering (01.09.2004)
Published in Journal of micromechanics and microengineering (01.09.2004)
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Journal Article
Conference Proceeding
Nonlinearity and hysteresis of resonant strain gauges
Chengqun Gui, Legtenberg, R., Tilmans, H.A.C., Fluitman, J.H.J., Elwenspoek, M.
Published in Journal of microelectromechanical systems (01.03.1998)
Published in Journal of microelectromechanical systems (01.03.1998)
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Journal Article
A wet release process for fabricating slender and compliant suspended micro-mechanical structures
Pamidighantam, S, Laureyn, W, Rusu, C, Baert, K, Puers, R, Tilmans, H.A.C
Published in Sensors and actuators. A, Physical (15.01.2003)
Published in Sensors and actuators. A, Physical (15.01.2003)
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Conference Proceeding