Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals
PRUME, Klaus, MURALT, Paul, CALAME, Florian, SCHMITZ-KEMPEN, Thorsten, TIEDKE, Stephan
Published in Journal of electroceramics (01.12.2007)
Published in Journal of electroceramics (01.12.2007)
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Conference Proceeding
Journal Article
Infrared-laser based characterization of the pyroelectricity in AlScN thin-films
Bette, Sebastian, Fichtner, Simon, Bröker, Sebastian, Nielen, Lutz, Schmitz-Kempen, Thorsten, Wagner, Bernhard, Van Buggenhout, Carl, Tiedke, Stephan, Tappertzhofen, Stefan
Published in Thin solid films (31.12.2019)
Published in Thin solid films (31.12.2019)
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Journal Article
Compensation of the Parasitic Capacitance of a Scanning Force Microscope Cantilever Used for Measurements on Ferroelectric Capacitors of Submicron Size by Means of Finite Element Simulations
Prume, Klaus, Roelofs, Andreas, Schmitz, Thorsten, Reichenberg, Bernd, Tiedke, Stephan, Waser, Rainer
Published in Japanese Journal of Applied Physics (01.11.2002)
Published in Japanese Journal of Applied Physics (01.11.2002)
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Journal Article
Comparable measurements and modeling of piezoelectric thin films for MEMS application
Schmitz-Kempen, Thorsten, Tiedke, Stephan, Mardilovich, Peter, Sivaramakrishnan, Subramanian, Lisec, Thomas, Stoppel, Fabian, Trolier-McKinstry, Susan, Muralt, Paul
Published in 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM) (01.07.2013)
Published in 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM) (01.07.2013)
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Conference Proceeding
Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level
Mertin, Stefan, Nyffeler, Clemens, Makkonen, Tapani, Heinz, Bernd, Mazzalai, Andrea, Schmitz-Kempen, Thorsten, Tiedke, Stephan, Pensala, Tuomas, Muralt, Paul
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
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Conference Proceeding
High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films
Mertin, Stefan, Heinz, Bernd, Mazzalar, Andrea, Schmitz-Kempen, Thorsten, Tiedke, Stephan, Pensala, Tuomas
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01.10.2018)
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01.10.2018)
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Conference Proceeding
Quasistatic and Pulse Measuring Techniques
Torrezan, Antonio, Medeiros‐Ribeiro, Gilberto, Tiedke, Stephan
Published in Resistive Switching (2016)
Published in Resistive Switching (2016)
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Book Chapter
Molekülpositioniereinrichtung
FEILBACH, HERBERT, WANDLOWSKI, THOMAS, SACHSENHAUSEN, HANS, KARTHAEUSER, SILVIA, SZOT, KRYSZTOF, TIEDKE, STEPHAN
Year of Publication 11.08.2005
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Year of Publication 11.08.2005
Patent
METHOD AND DEVICE FOR CHARACTERIZING A SAMPLE BY MEANS OF DOUBLE-BEAM LASER INTERFEROMETRY
SCHMITZ-KEMPEN, THORSTEN, REICHENBERG, BERND, PRUME, KLAUS, TIEDKE, STEPHAN
Year of Publication 24.05.2007
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Year of Publication 24.05.2007
Patent