MEMS integration method
ZHAO DANQI, WANG WEI, TIAN DAYU, LIU PENG, LI TING, ZHANG DACHENG, LUO KUI, YANG FANG
Year of Publication 27.06.2012
Get full text
Year of Publication 27.06.2012
Patent
A processing method for MEMS micro generator based on inorganic electret
WANG YING, TIAN DAYU, JIN YUFENG, ZHANG JINWEN, HAO YILONG, CHEN ZHIYU
Year of Publication 01.12.2010
Get full text
Year of Publication 01.12.2010
Patent
Self-packaged MEMS (micro-electro-mechanical systems) device and infrared sensor
ZHAO DANQI, WANG WEI, TIAN DAYU, LIU PENG, HUANG XIAN, LI TING, ZHANG DACHENG, HE JUN, LUO KUI, YANG FANG
Year of Publication 24.04.2013
Get full text
Year of Publication 24.04.2013
Patent
Method for improving stress linearity of film
WANG WEI, TIAN DAYU, LIU PENG, YAN YUAN, LI TING, LUO KUI, ZHANG DACHENG, YANG FANG
Year of Publication 18.01.2012
Get full text
Year of Publication 18.01.2012
Patent
Method for enhancing bonding strength of SOG (silicon on glass) process microstructure
ZHAO DANQI, WANG WEI, TIAN DAYU, LIN CHEN, LIU PENG, HUANG XIAN, LI TING, HE JUN, ZHANG DACHENG, LUO KUI, YANG FANG
Year of Publication 03.04.2013
Get full text
Year of Publication 03.04.2013
Patent
MEMS (Micro Electro Mechanical System) piezoresistive type absolute pressure sensor based on SOI (Silicon on Insulator) silicon chip
ZHAO DANQI, WANG WEI, TIAN DAYU, LIN CHEN, LIU PENG, HUANG XIAN, LI TING, ZHANG DACHENG, HE JUN, LUO KUI, YANG FANG
Year of Publication 20.03.2013
Get full text
Year of Publication 20.03.2013
Patent
MEMS piezoresistive pressure transducer without strain membrane structure and manufacture method thereof
ZHAO DANQI, WANG WEI, TIAN DAYU, LIN CHEN, LIU PENG, HUANG XIAN, LI TING, ZHANG DACHENG, HE JUN, LUO KUI, YANG FANG
Year of Publication 20.03.2013
Get full text
Year of Publication 20.03.2013
Patent
Method and apparatus for applying forces perpendicular to cantilever beam
ZHAO DANQI, WANG WEI, TIAN DAYU, LIU PENG, LI TING, HE JUN, ZHANG DACHENG, LUO KUI, YANG FANG
Year of Publication 13.03.2013
Get full text
Year of Publication 13.03.2013
Patent
Method for determining etching time of sacrificial layer in real time
ZHAO DANQI, WANG WEI, TIAN DAYU, LIU PENG, HUANG XIAN, LI TING, ZHANG DACHENG, HE JUN, LUO KUI, YANG FANG
Year of Publication 13.03.2013
Get full text
Year of Publication 13.03.2013
Patent
Testing structure for corrosion time of sacrificial layer and preparation method of MEMS (Micro-electromechanical System) device
ZHAO DANQI, WANG WEI, TIAN DAYU, LIU PENG, HUANG XIAN, LI TING, ZHANG DACHENG, HE JUN, LUO KUI, YANG FANG
Year of Publication 13.03.2013
Get full text
Year of Publication 13.03.2013
Patent
Piezoresistive pressure sensor of MEMS (Micro-Electro-Mechanical Systems) and preparation method thereof
ZHAO DANQI, WANG WEI, TIAN DAYU, LIU PENG, HUANG XIAN, LI TING, ZHANG DACHENG, HE JUN, LUO KUI, YANG FANG
Year of Publication 27.02.2013
Get full text
Year of Publication 27.02.2013
Patent
Post-CMOS integrated method for threshold presetting
ZHAO DANQI, WANG WEI, TIAN DAYU, LIU PENG, HUANG XIAN, LI TING, ZHANG DACHENG, HE JUN, LUO KUI, YANG FANG
Year of Publication 20.02.2013
Get full text
Year of Publication 20.02.2013
Patent
Method for monitoring corrosion depth of silicon in real time
WANG WEI, WANG YING, TIAN DAYU, YAN YUAN, LI TING, ZHANG DACHENG, LUO KUI, YANG FANG
Year of Publication 09.11.2011
Get full text
Year of Publication 09.11.2011
Patent
Charge testing method in plasma environment and testing system
ZHAO DANQI, WANG WEI, TIAN DAYU, LIU PENG, LI TING, ZHANG DACHENG, LUO KUI, YANG FANG
Year of Publication 07.09.2011
Get full text
Year of Publication 07.09.2011
Patent
Charge-detecting chip and manufacturing method thereof
ZHAO DANQI, WANG WEI, TIAN DAYU, LIU PENG, LI TING, ZHANG DACHENG, LUO KUI, YANG FANG
Year of Publication 24.08.2011
Get full text
Year of Publication 24.08.2011
Patent
Wet etching method and device for micro-nano structure
WANG WEI, TIAN DAYU, LIU PENG, YAN YUAN, LI TING, LUO KUI, ZHANG DACHENG, YANG FANG
Year of Publication 17.08.2011
Get full text
Year of Publication 17.08.2011
Patent
Method for preparing masking microstructure
WANG WEI, WANG YING, TIAN DAYU, LIU PENG, LI JING, LI TING, ZHANG DACHENG, LUO KUI
Year of Publication 27.07.2011
Get full text
Year of Publication 27.07.2011
Patent
Ultrathin silicon based particle detector and preparing method thereof
TIAN DAYU, JIN YUFENG, ZHANG LU, WANG JINYAN, LI KEJIA, ZHANG TAIPING
Year of Publication 17.03.2010
Get full text
Year of Publication 17.03.2010
Patent
Signal extraxtor of multi-strip silicon detector
JILIAN TAN, GENMING JIN, BAOJUN NING, HUSHAN XU, LIMIN DUAN, LIANRONG MA, DAYU TIAN, XIAOBING WANG, SONGLIN LI, XIAOHUA YUAN, ZIWEI LU, HONGWEI WANG
Year of Publication 05.07.2006
Get full text
Year of Publication 05.07.2006
Patent