Hybrid lithographic method for fabricating complex multidimensional structures
LEE JAE-HWANG, KOOI STEVEN E, SINGER JONATHAN PHILLIP, THOMAS EDWIN LORIMER
Year of Publication 18.06.2013
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Year of Publication 18.06.2013
Patent
HYBRID LITHOGRAPHIC METHOD FOR FABRICATING COMPLEX MULTIDIMENSIONAL STRUCTURES
LEE JAE-HWANG, KOOI STEVEN E, SINGER JONATHAN PHILLIP, THOMAS EDWIN LORIMER
Year of Publication 28.06.2012
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Year of Publication 28.06.2012
Patent