Method for in-die overlay control using FEOL dummy fill layer
Schmidt, Martin, Thierbach, Stefan, Schuring, Andreas, Moll, Peter, Hartig, Carsten, Fischer, Daniel, Ruhm, Matthias, Überreiter, Guido, Rongen, Stefan
Year of Publication 30.10.2018
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Year of Publication 30.10.2018
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METHOD FOR IN-DIE OVERLAY CONTROL USING FEOL DUMMY FILL LAYER
SCHURING Andreas, SCHMIDT Martin, THIERBACH Stefan, RONGEN Stefan, RUHM Matthias, MOLL Peter, FISCHER Daniel, HARTIG Carsten, ÜBERREITER Guido
Year of Publication 16.11.2017
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Year of Publication 16.11.2017
Patent
Method for in-die overlay control using feol dummy fill layer
RUHM, MATTHIAS, THIERBACH, STEFAN, HARTIG, CARSTEN, UEBERREITER, GUIDO, SCHURING, ANDREAS, FISCHER, DANIEL, MOLL, PETER, RONGEN, STEFAN, SCHMIDT, MARTIN
Year of Publication 01.07.2019
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Year of Publication 01.07.2019
Patent
Method for in-die overlay control using FEOL dummy fill layer
RUHM, MATTHIAS, THIERBACH, STEFAN, HARTIG, CARSTEN, UEBERREITER, GUIDO, SCHURING, ANDREAS, FISCHER, DANIEL, MOLL, PETER, RONGEN, STEFAN, SCHMIDT, MARTIN
Year of Publication 16.02.2018
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Year of Publication 16.02.2018
Patent
Method For In-die Overlay Control Using Feol Dummy Fill Layer
MARTIN SCHMIDT, STEFAN RONGEN, STEFAN THIERBACH, PETER MOLL, CARSTEN HARTIG, ANDREAS SCHURING, DANIEL FISCHER, GUIDO UBERREITER, MATTHIAS RUHM
Year of Publication 08.12.2017
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Year of Publication 08.12.2017
Patent