by THESEN, M. W, RUTTLOFF, S, LIMBERG, R. P. F, VOGLER, M, NEES, D, GRÜTZNER, G
Published in Microelectronic engineering (01.07.2014)

by Haslinger, M J, Mitteramskogler, T, Kopp, S, Leichtfried, H, Messerschmidt, M, Thesen, M W, Mühlberger, M
Published in Nanotechnology (21.08.2020)

by Si, Shuhao, Weigel, C., Messerschmidt, M., Thesen, M.W., Sinzinger, S., Strehle, S.
Published in Micro and Nano Engineering (01.04.2020)

by Bagnich, S. A., Unger, Th, Jaiser, F., Neher, D., Thesen, M. W., Krueger, H.
Published in Journal of applied physics (01.08.2011)