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Published in Thin solid films (01.07.2002)
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A feature scale model for chemical mechanical planarization of damascene structures
Saxena, Ravi, Thakurta, Dipto G., Gutmann, Ronald J., Gill, William N.
Published in Thin solid films (02.02.2004)
Published in Thin solid films (02.02.2004)
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Chemical mechanical polishing mechanisms of low dielectric constant polymers in copper slurries
BORST, C. L, THAKURTA, D. G, GILL, W. N, GUTMANN, R. J
Published in Journal of the Electrochemical Society (01.11.1999)
Published in Journal of the Electrochemical Society (01.11.1999)
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PatternPaint: Generating Layout Patterns Using Generative AI and Inpainting Techniques
Zhou, Guanglei, Korrapati, Bhargav, Reddy, Gaurav Rajavendra, Hu, Jiang, Chen, Yiran, Thakurta, Dipto G
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Year of Publication 02.09.2024
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