REAL TIME MONITORING WITH CLOSED LOOP CHUCKING FORCE CONTROL
MAKHRATCHEV KONSTANTIN, BOYD WENDELL GLENN JR, BUSCHE MATTHEW JAMES, ONO MASANORI, PARKHE VIJAY D, THACH SENH
Year of Publication 25.11.2019
Get full text
Year of Publication 25.11.2019
Patent
REAL-TIME MONITORING USING CLOSED-LOOP CHUCKING FORCE CONTROL
MATTHEW JAMES BUSCHE, WENDELL GLENN BOYD JR, ONO MASANORI, KONSTANTIN MAKHRATCHEV, THACH SENH, VIJAY D PARKHE
Year of Publication 21.11.2019
Get full text
Year of Publication 21.11.2019
Patent
SINGLE-BODY ELECTROSTATIC CHUCK
LUBOMIRSKY DMITRY, MAKHRATCHEV KONSTANTIN, THACH SENH, SUN JENNIFER Y
Year of Publication 01.09.2015
Get full text
Year of Publication 01.09.2015
Patent
EROSION RESISTANT YTTRIUM COMPRISING METAL WITH OXIDIZED COATING FOR PLASMA CHAMBER COMPONENTS
XU LI, GRAVES THOMAS, GUAN REN GUAN, COLLINS KENNETH S, THACH SENH, SUN JENNIFER Y
Year of Publication 10.09.2010
Get full text
Year of Publication 10.09.2010
Patent
CERAMIC COATING COMPRISING YTTRIUM WHICH IS RESISTANT TO A REDUCING PLASMA
XU LI, YUAN JIE, HE XIAOMING, DUAN REN GUAN, GRAVES THOMAS, COLLINS KENNETH S, THACH SENH, SUN JENNIFER Y
Year of Publication 08.11.2010
Get full text
Year of Publication 08.11.2010
Patent
METHOD OF COATING SEMICONDUCTOR PROCESSING APPARATUS WITH PROTECTIVE YTTRIUM-CONTAINING COATINGS
XU LI, YUAN JIE, HE XIAOMING, DUAN REN GUAN, GRAVES THOMAS, COLLINS KENNETH S, THACH SENH, DEMPSTER JIM, SUN JENNIFER Y
Year of Publication 19.05.2010
Get full text
Year of Publication 19.05.2010
Patent
METHOD AND APPARATUS FOR CONTROLLING TEMPERATURE OF SEMICONDUCTOR SUBSTRATE
LUBOMIRSKY DMITRY, KOOSAU DENNIS, WANG DANNY, EXLINE PAUL, THACH SENH, MOK YEUK-FAI EDWIN
Year of Publication 16.04.2001
Get full text
Year of Publication 16.04.2001
Patent
Real time monitoring with closed loop chucking force control
Makhratchev, Konstantin, Ono, Masanori, Busche, Matthew James, Thach, Senh, Boyd, Jr., Wendell Glenn, Parkhe, Vijay D
Year of Publication 29.10.2019
Get full text
Year of Publication 29.10.2019
Patent
Pixilated cooling, temperature controlled substrate support assembly
Makhratchev, Konstantin, Boyd, Jr., Wendell, Ono, Masanori, Busche, Matthew James, Thach, Senh, Parkhe, Vijay D
Year of Publication 03.09.2019
Get full text
Year of Publication 03.09.2019
Patent