Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
Akiyama, Morito, Kamohara, Toshihiro, Kano, Kazuhiko, Teshigahara, Akihiko, Takeuchi, Yukihiro, Kawahara, Nobuaki
Published in Advanced materials (Weinheim) (02.02.2009)
Published in Advanced materials (Weinheim) (02.02.2009)
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Journal Article
Wave Propagation Direction and c-Axis Tilt Angle Influence on the Performance of ScAlN/Sapphire-Based SAW Devices
Kochhar, Abhay, Yamamoto, Yasuo, Teshigahara, Akihiko, Hashimoto, Ken-ya, Tanaka, Shuji, Esashi, Masayoshi
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.07.2016)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.07.2016)
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Journal Article
High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film
Kusano, Yuri, Ishii, Itaru, Kamiya, Tatsuya, Teshigahara, Akihiko, Luo, Guo-Lun, Horsley, David A.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.09.2019)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.09.2019)
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Journal Article
Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films
Yanagitani, Takahiko, Arakawa, Kazuki, Kano, Kazuhiko, Teshigahara, Akihiko, Akiyama, Morito
Published in 2010 IEEE International Ultrasonics Symposium (01.10.2010)
Published in 2010 IEEE International Ultrasonics Symposium (01.10.2010)
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Conference Proceeding
ScAlN Lamb wave resonator in GHz range released by XeF2 etching
Konno, Akira, Sumisaka, Masahiro, Teshigahara, Akihiko, Kano, Kazuhiko, Hashimo, Ken-ya, Hirano, Hideki, Esashi, Masayoshi, Kadota, Michio, Tanaka, Shuji
Published in 2013 IEEE International Ultrasonics Symposium (IUS) (01.07.2013)
Published in 2013 IEEE International Ultrasonics Symposium (IUS) (01.07.2013)
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Conference Proceeding
압전 소자
MASUMOTO NAOKI, KUCHIJI HIROYUKI, YAMADA HIDEO, TESHIGAHARA AKIHIKO, MIZUTANI ATSUSHI
Year of Publication 05.04.2022
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Year of Publication 05.04.2022
Patent
PIEZO-ELECTRIC ELEMENT
TESHIGAHARA, Akihiko, YAMADA, Hideo, MIZUTANI, Atsushi, KUCHIJI, Hiroyuki, MASUMOTO, Naoki
Year of Publication 11.02.2021
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Year of Publication 11.02.2021
Patent
Deposition techniques of c-axis-tilted ScAlN films by conventional RF magnetron sputtering
Arakawa, Kazuki, Yanagitani, Takahiko, Kano, Kazuhiko, Teshigahara, Akihiko, Akiyama, Morito
Published in 2010 IEEE International Ultrasonics Symposium (01.10.2010)
Published in 2010 IEEE International Ultrasonics Symposium (01.10.2010)
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Conference Proceeding