Highly reliable enhanced nitride interface process of barrier low-k using ultra-thin SiN with moisture blocking capability
Usami, Tatsuya, Miura, Yukio, Nakamura, Tomoyuki, Tsuchiya, Hideaki, Kobayashi, Chikako, Ohto, Koichi, Hiroshima, Shoichi, Tanaka, Mikio, Kunishima, Hiroyuki, Ishizuka, Issei, Kuwajima, Teruhiro, Sakurai, Michio, Yokogawa, Shinji, Fujii, Kunihiro
Published in Microelectronic engineering (01.12.2013)
Published in Microelectronic engineering (01.12.2013)
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Journal Article
Semiconductor device
Kuwajima, Teruhiro, Ono, Akio, Nakashiba, Yasutaka, Matsumoto, Akira, Iida, Tetsuya
Year of Publication 05.01.2021
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Year of Publication 05.01.2021
Patent
SEMICONDUCTOR DEVICE
IIDA, Tetsuya, NAKASHIBA, Yasutaka, ONO, Akio, KUWAJIMA, Teruhiro, MATSUMOTO, Akira
Year of Publication 19.11.2020
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Year of Publication 19.11.2020
Patent
Circuit Under on-chip-inductor structure (CUL) for the areal size reduction of Si-based RF circuit
Uchida, Shinichi, Kuwajima, Teruhiro, Koh, Risho, Kuramoto, Takafumi, Ono, Akio, Kamada, Takuho, Iida, Tetsuya, Matsumoto, Akira, Nakashiba, Yasutaka
Published in 2019 Electron Devices Technology and Manufacturing Conference (EDTM) (01.03.2019)
Published in 2019 Electron Devices Technology and Manufacturing Conference (EDTM) (01.03.2019)
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Conference Proceeding