Search Results - "TERASHITA, Yuichi" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Novel High Sensitivity EUV Photoresist for Sub-7 nm Node

Novel High Sensitivity EUV Photoresist for Sub-7 nm Node

by Nagai, Tomoki, Nakagawa, Hisashi, Naruoka, Takehiko, Dei, Satoshi, Tagawa, Seiichi, Oshima, Akihiro, Nagahara, Seiji, Shiraishi, Gosuke, Yoshihara, Kosuke, Terashita, Yuichi, Minekawa, Yukie, Buitrago, Elizabeth, Ekinci, Yasin, Yildirim, Oktay, Meeuwissen, Marieke, Hoefnagels, Rik, Rispens, Gijsbert, Verspaget, Coen, Maas, Raymond
Published in Journal of Photopolymer Science and Technology (01.01.2016)

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Journal Article

HEAT TREATMENT DEVICE, HEAT TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM

HEAT TREATMENT DEVICE, HEAT TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM

by TANAKA KOICHIRO, OTSUKA YUKINOBU, TERASHITA YUICHI
Year of Publication 24.11.2023

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Patent

HEAT PROCESSING DEVICE, HEAT PROCESSING METHOD, AND COMPUTER STORAGE MEDIUM

HEAT PROCESSING DEVICE, HEAT PROCESSING METHOD, AND COMPUTER STORAGE MEDIUM

by TERASHITA, Yuichi, TANAKA, Kouichirou, OTSUKA, Yukinobu
Year of Publication 16.11.2023

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Patent

HEAT TREATMENT DEVICE, HEAT TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM

HEAT TREATMENT DEVICE, HEAT TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM

by TANAKA KOICHIRO, USHIMARU KOJI, OTSUKA YUKINOBU, IIZUKA KENJI, TERASHITA YUICHI
Year of Publication 24.11.2023

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Patent

SUBSTRATE PROCESSING METHOD SUBSTRATE PROCESSING APPARATUS AND COMPUTER-READABLE RECORDING MEDIUM

SUBSTRATE PROCESSING METHOD SUBSTRATE PROCESSING APPARATUS AND COMPUTER-READABLE RECORDING MEDIUM

by OTSUKA YUKINOBU, YOSHIHARA KOSUKE, TADATOMO HIROKI, SHIBATA NAOKI, TERASHITA YUICHI, TAKAKI SHINSUKE
Year of Publication 30.07.2024

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Patent

SUBSTRATE PROCESSING METHOD SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM

SUBSTRATE PROCESSING METHOD SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM

by MINEKAWA YUKIE, SHIRAISHI GOUSUKE, TERASHITA YUICHI
Year of Publication 13.02.2018

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Patent

SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT DEVICE AND RECORDING MEDIUM

SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT DEVICE AND RECORDING MEDIUM

by MINEKAWA YUKIE, SHIRAISHI GOSUKE, TERASHITA YUICHI
Year of Publication 08.02.2018

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Patent

DEVELOPING METHOD, DEVELOPING DEVICE, AND COMPUTER-READABLE RECORDING MEDIUM

DEVELOPING METHOD, DEVELOPING DEVICE, AND COMPUTER-READABLE RECORDING MEDIUM

by IZEKI TOSHIHIRO, TAKEGUCHI HIROSHI, TERASHITA YUICHI
Year of Publication 07.09.2017

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Patent

Chiral Separation of Naphthoylamino Acids by Capillary Zone Electrophoresis with Selectively Methylated Cyclodextrin Derivatives

Chiral Separation of Naphthoylamino Acids by Capillary Zone Electrophoresis with Selectively Methylated Cyclodextrin Derivatives

by MIURA, Masaru, TERASHITA, Yuichi, FUNAZO, Koichi, TANAKA, Minoru
Published in Analytical Sciences (01.03.1999)

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Journal Article

DEVELOPING METHOD, DEVELOPING DEVICE, AND COMPUTER-READABLE RECORDING MEDIUM

DEVELOPING METHOD, DEVELOPING DEVICE, AND COMPUTER-READABLE RECORDING MEDIUM

by IZEKI TOSHIHIRO, TAKEGUCHI HIROSHI, TERASHITA YUICHI
Year of Publication 07.03.2016

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Patent

DEVELOPING METHOD, DEVELOPING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM

DEVELOPING METHOD, DEVELOPING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM

by ISEKI TOMOHIRO, TAKEGUCHI HIROFUMI, TERASHITA YUICHI
Year of Publication 03.02.2016

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Patent

DEVELOPING METHOD AND DEVICE, AND COMPUTER-READABLE RECORDING MEDIUM

DEVELOPING METHOD AND DEVICE, AND COMPUTER-READABLE RECORDING MEDIUM

by IZEKI TOSHIHIRO, TAKEGUCHI HIROSHI, TERASHITA YUICHI
Year of Publication 12.01.2016

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Patent

DEVELOPING METHOD, DEVELOPING APPARATUS AND COMPUTER READABLE STORAGE MEDIUM

DEVELOPING METHOD, DEVELOPING APPARATUS AND COMPUTER READABLE STORAGE MEDIUM

by ISEKI TOMOHIRO, TAKEGUCHI HIROFUMI, TERASHITA YUICHI
Year of Publication 28.12.2015

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Patent

HEAT TREATMENT METHOD, HEAT TREATMENT APPARATUS, AND STORAGE MEDIUM

HEAT TREATMENT METHOD, HEAT TREATMENT APPARATUS, AND STORAGE MEDIUM

by TSURUTA TOYOHISA, IZEKI TOSHIHIRO, TERASHITA YUICHI
Year of Publication 07.09.2015

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Patent

DEVELOPMENT PROCESSOR, DEVELOPMENT PROCESSING METHOD, PROGRAM AND COMPUTER STORAGE MEDIUM

DEVELOPMENT PROCESSOR, DEVELOPMENT PROCESSING METHOD, PROGRAM AND COMPUTER STORAGE MEDIUM

by IZEKI TOSHIHIRO, TAKEGUCHI HIROSHI, TERASHITA YUICHI
Year of Publication 08.06.2015

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Patent

COATING PROCESSING METHOD, PROGRAM, STORAGE MEDIUM FOR COMPUTER AND COATING PROCESSING APPARATUS

COATING PROCESSING METHOD, PROGRAM, STORAGE MEDIUM FOR COMPUTER AND COATING PROCESSING APPARATUS

by FUJIMOTO AKIHIRO, TAKAYANAGI KOJI, TERASHITA YUICHI
Year of Publication 28.05.2015

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Patent

COATING PROCESSING METHOD, PROGRAM, COMPUTER STORAGE MEDIUM AND COATING PROCESSING APPARATUS

COATING PROCESSING METHOD, PROGRAM, COMPUTER STORAGE MEDIUM AND COATING PROCESSING APPARATUS

by TAKAYANAGI YASUHARU, FUJIMOTO AKIHIRO, TERASHITA YUICHI
Year of Publication 28.05.2015

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Patent

COATING FILM FORMING APPARATUS, COATING FILM FORMING METHOD AND STORAGE MEDIUM

COATING FILM FORMING APPARATUS, COATING FILM FORMING METHOD AND STORAGE MEDIUM

by ICHINO KATSUNORI, YOSHIHARA KOSUKE, TERASHITA YUICHI
Year of Publication 05.02.2015

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Patent

COATING FILM FORMATION DEVICE, COATING FILM FORMATION METHOD AND RECORDING MEDIUM

COATING FILM FORMATION DEVICE, COATING FILM FORMATION METHOD AND RECORDING MEDIUM

by ICHINO KATSUNORI, YOSHIHARA KOSUKE, TERASHITA YUICHI
Year of Publication 19.01.2015

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Patent

COATING FILM FORMING APPARATUS, COATING FILM FORMING METHOD, AND RECORDING MEDIUM

COATING FILM FORMING APPARATUS, COATING FILM FORMING METHOD, AND RECORDING MEDIUM

by ICHINO KATSUNORI, YOSHIHARA KOUSUKE, TERASHITA YUICHI
Year of Publication 06.01.2015

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Patent

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