Immersion-Specific Defects of High-Receding-Angle Topcoat
Terai, Mamoru, Kumada, Teruhiko, Hagiwara, Takuya, Hanawa, Tetsuro, Ando, Tomoyuki, Matsunobe, Takeshi, Okada, Kazuyuki, Muraji, Yuichi, Yoshikawa, Kazuhiro, Man, Naoki
Published in Japanese Journal of Applied Physics (01.06.2010)
Published in Japanese Journal of Applied Physics (01.06.2010)
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Journal Article
Surface Segregation Analysis of Hydrophobic Additive of Non-topcoat Resist
Hagiwara, Takuya, Ishibashi, Takeo, Terai, Mamoru, Kumada, Teruhiko, Shirota, Naoko, Yokokoji, Osamu, Matsunobu, Takeshi, Man, Naoki, Yoshikawa, Kazuhiro, Tanahashi, Yusuke, Hanawa, Tetsuro
Published in Journal of Photopolymer Science and Technology (01.01.2008)
Published in Journal of Photopolymer Science and Technology (01.01.2008)
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Journal Article
Novel Wafer Bevel Treatment for Water Immersion Lithography
Terai, Mamoru, Ishibashi, Takeo, Hagiwara, Takuya, Hanna, Tetsuro, Kumada, Teruhiko, Takebe, Yoko, Yokokoji, Osamu, Fujiwara, Tomoharu, Jiang, Jianhai, Niwa, Takafumi, Wakamizu, Shinya, Kyouda, Hideharu
Published in Journal of Photopolymer Science and Technology (01.01.2008)
Published in Journal of Photopolymer Science and Technology (01.01.2008)
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Journal Article
VENTILATING DEVICE AND VENTILATION SYSTEM
FUKAYA Yoshihiro, TAKADA Masaru, HAYASHI Hiroyasu, ITO Masahiro, ITO Kazuhiro, TERAI Mamoru
Year of Publication 12.09.2024
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Year of Publication 12.09.2024
Patent
Characteristics of ArF Immersion Lithography Using Topcoat
Ishibashi, Takeo, Hanawa, Tetsuro, Suganaga, Tsohifumi, Maejima, Shinroku, Narimatsu, Koichiro, Suko, Kazuyuki, Terai, Mamoru, Kumada, Teruhiko, Ando, Tomoyuki
Published in Journal of Photopolymer Science and Technology (01.01.2006)
Published in Journal of Photopolymer Science and Technology (01.01.2006)
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Journal Article
ILLUMINATION DEVICE AND DIFFUSER
TERAI MAMORU, FUJII YUSUKE, NITTA YASUYUKI, YAMAZAKI HARUKA, OKAGAKI MANABU
Year of Publication 17.06.2021
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Year of Publication 17.06.2021
Patent
THERMAL STORAGE DEVICE
NOMURA, Yasumitsu, SATO, Minoru, OHO, Takumi, TERAI, Mamoru, NOBUTOKI, Hideharu
Year of Publication 08.04.2021
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Year of Publication 08.04.2021
Patent
MICROFLUID DEVICE
TERAI MAMORU, NAMURA KYOKO, SUGIMOTO YURI, IZUMIYA YU, MINAMIDE AYUMI, SUZUKI MOTOFUMI
Year of Publication 03.08.2022
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Year of Publication 03.08.2022
Patent