Known Good Die Carrier Reliability Evaluation
Agahdel, F., Hongbee Teoh, Rlzzo, S.P., Roebuck, R.D.
Published in International Integrated Reliability Workshop Final Report (1993)
Published in International Integrated Reliability Workshop Final Report (1993)
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Conference Proceeding
Apparatus and method for controlled cleaving
TEOH HONGBEE, LAMM ALBERT, HENLEY FRANCOIS, PALER ANTHONY, ONG PHILIP
Year of Publication 14.07.2005
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Year of Publication 14.07.2005
Patent
AN APPARATUS AND METHOD FOR CONTROLLED CLEAVING
PALER, ANTHONY, ONG, PHILIP, TEOH, HONGBEE, LAMM, ALBERT, HENLEY, FRANCOIS, J
Year of Publication 27.12.2006
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Year of Publication 27.12.2006
Patent
AN APPARATUS AND METHOD FOR CONTROLLED CLEAVING
TEOH HONGBEE, HENLEY FRANCOIS J, LAMM ALBERT, PALER ANTHONY, ONG PHILIP
Year of Publication 15.12.2006
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Year of Publication 15.12.2006
Patent
AN APPARATUS AND METHOD FOR CONTROLLED CLEAVING
PALER, ANTHONY, ONG, PHILIP, TEOH, HONGBEE, LAMM, ALBERT, HENLEY, FRANCOIS, J
Year of Publication 20.10.2005
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Year of Publication 20.10.2005
Patent
AN APPARATUS AND METHOD FOR CONTROLLED CLEAVING
PALER, ANTHONY, ONG, PHILIP, TEOH, HONGBEE, LAMM, ALBERT, HENLEY, FRANCOIS, J
Year of Publication 28.07.2005
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Year of Publication 28.07.2005
Patent
Showerhead assembly for a processing chamber
Hytros, Mark, Tran, Truc, Teoh, Hongbee, Lei, Lawrence, Gelatos, Avgerinos, Umotoy, Salvador
Year of Publication 17.07.2003
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Year of Publication 17.07.2003
Patent
METHOD OF CVD TITANIUM NITRIDE FILM DEPOSITION FOR INCREASED TITANIUM NITRIDE FILM UNIFORMITY
Nguyen, Hanh, Hu, Jianhua, Chiao, Steve, Yuan, Xiaoxiong, Chang, Anzhong, Teoh, Hongbee, Gelatos, Avgerinos
Year of Publication 23.01.2003
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Year of Publication 23.01.2003
Patent
Showerhead assembly for a processing chamber
GELATOS AVGERINOS, TEOH HONGBEE, HYTROS MARK M, TRAN TRUC T, LEI LAWRENCE CHUNG-LAI, UMOTOY SALVADOR P
Year of Publication 07.12.2004
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Year of Publication 07.12.2004
Patent
Showerhead assembly for a processing chamber
Hytros, Mark M, Tran, Truc T, Teoh, Hongbee, Lei, Lawrence Chung-Lai, Gelatos, Avgerinos, Umotoy, Salvador P
Year of Publication 07.12.2004
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Year of Publication 07.12.2004
Patent
SHOWERHEAD ASSEMBLY FOR A PROCESSING CHAMBER
GELATOS, AVGERINOS, TRAN, TRUC, T, TEOH, HONGBEE, UMOTOY, SALVATOR, P, LEI, LAWRENCE, CHUNG-LAI, HYTROS, MARK, M
Year of Publication 24.07.2003
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Year of Publication 24.07.2003
Patent
Showerhead assembly for a processing chamber
GELATOS AVGERINOS, TEOH HONGBEE, HYTROS MARK M, TRAN TRUC T, LEI LAWRENCE CHUNG-LAI, UMOTOY SALVADOR P
Year of Publication 17.07.2003
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Year of Publication 17.07.2003
Patent
METHOD OF CVD TITANIUM NITRIDE FILM DEPOSITION FOR INCREASED TITANIUM NITRIDE FILM UNIFORMITY
HU JIANHUA, CHIAO STEVE H, GELATOS AVGERINOS, NGUYEN HANH D, TEOH HONGBEE, YUAN XIAOXIONG, CHANG ANZHONG
Year of Publication 23.01.2003
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Year of Publication 23.01.2003
Patent
Ceramic substrate support
TEOH HONGBEE, UMOTOY SAL, NGUYEN ANH N, YUAN XIAOXIONG, CHANG ANZHONG, ROSE RON, LEI LAWRENCE CHUNG-LAI
Year of Publication 17.12.2002
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Year of Publication 17.12.2002
Patent
Ceramic substrate support
Lei, Lawrence Chung-Lai, Umotoy, Sal, Yuan, Xiaoxiong, Chang, Anzhong, Teoh, Hongbee, Nguyen, Anh N, Rose, Ron
Year of Publication 17.12.2002
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Year of Publication 17.12.2002
Patent
An apparatus and method for controlled cleaving
TEOH HONGBEE, HENLEY FRANCOIS J, LAMM ALBERT, PALER ANTHONY, ONG PHILIP
Year of Publication 30.12.2009
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Year of Publication 30.12.2009
Patent
CERAMIC SUBSTRATE SUPPORT BODY
TEOH HONGBEE, UMOTOY SAL, NGUYEN ANH N, YUAN XIAOXIONG, CHANG ANZHONG, ROSE RON, LAWRENCE CHUN-RAI RAY
Year of Publication 29.03.2002
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Year of Publication 29.03.2002
Patent
Substrate support for a semiconductor processing chamber
ROSE, RON, CHANG, ANZHONG, UMOTOY, SAL, TEOH, HONGBEE, NGUYEN, ANH N, CHUNG-LAI LEI, LAWRENCE, YUAN, XIAOXIONG
Year of Publication 02.01.2002
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Year of Publication 02.01.2002
Patent
Reliability assessment of high lead count TAB package
Ling, J., Teoh, H., Sorrells, D., Jones, J.
Published in IEEE transactions on components, hybrids, and manufacturing technology (01.12.1992)
Published in IEEE transactions on components, hybrids, and manufacturing technology (01.12.1992)
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Journal Article
Conference Proceeding