Optical measurement of the roughness of sinusoidal surfaces
Vorburger, T.V., Gilsinn, D.E., Scire, F.E., McLay, M.J., Giauque, C.H.W., Teague, E.C.
Published in Wear (1986)
Published in Wear (1986)
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Journal Article
Conference Proceeding
Test structure for the in-plane locations of project features with nanometer-level accuracy traceable to a coordinate measurement system
Cresswell, M.W., Allen, R.A., Linholm, L.W., Ellenwood, C.H., Penzes, W.B., Teague, E.C.
Published in ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures (1993)
Published in ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures (1993)
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Conference Proceeding
ROOM TEMPERATURE GOLD-VACUUM-GOLD TUNNELING EXPERIMENTS
Teague, E.C.
Published in Journal of research of the National Bureau of Standards (1977) (01.07.1986)
Published in Journal of research of the National Bureau of Standards (1977) (01.07.1986)
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Journal Article
Measurement of patterned film linewidth for interconnect characterization
Linholm, L.W., Allen, R.A., Cresswell, M.W., Ghoshtagore, R.N., Mayo, S., Schafft, H.A., Kramar, J.A., Teague, E.C.
Published in Proceedings International Conference on Microelectronic Test Structures (1995)
Published in Proceedings International Conference on Microelectronic Test Structures (1995)
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Conference Proceeding
A new method to measure the distance between graduation lines on graduated scales
Penzes, W.B., Allen, R.A., Cresswell, M.W., Linholm, L.W., Teague, E.C.
Published in Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9) (1994)
Published in Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9) (1994)
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Conference Proceeding
Metrology standards for advanced semiconductor lithography referenced to atomic spacings and geometry
Teague, E.C., Linholm, L.W., Cresswell, M.W., Penzes, W.B., Kramar, J.A., Scire, F.E., Villarrubia, J.S., Jun, J.S.
Published in ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures (1993)
Published in ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures (1993)
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Conference Proceeding