Full reliability study of advanced metallization options for 30 nm A12pitch interconnects
Croes, Kristof, Demuynck, Steven, Siew, Yong, Pantouvaki, Marianna, Wilson, Christopher, Heylen, Nancy, Beyer, Gerald, TAkei, Zsolt
Published in Microelectronic engineering (01.06.2013)
Published in Microelectronic engineering (01.06.2013)
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Journal Article