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Method for forming high-K metal gate device
by
TAO LEE
-
WEE
,
CHEW HAN-GUAN
,
CHUANG HARRY HAK-LAY
,
JANG SYUN-MING
Year of Publication
17.12.2013
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METHOD FOR FORMING HIGH-K METAL GATE DEVICE
by
TAO LEE
-
WEE
,
CHEW HAN-GUAN
,
CHUANG HARRY HAK-LAY
,
JANG SYUN-MING
Year of Publication
12.05.2011
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Patent
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chemistry
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basic electric elements
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electric solid state devices not otherwise provided for
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semiconductor devices
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