EPI Surface Particle Reduction on NROM Word Line Application
Yang, He, Tang, Ji Y., Wang, Chenyu, Li, David, Hu, Bruce, Li, Peng
Published in ECS transactions (16.03.2012)
Published in ECS transactions (16.03.2012)
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Journal Article
Investigation of Intermittent Haze in 300mm SiGe Epitaxy Process and its Impact on PMOS Device Performance
He, Yonggen, He, Youfeng, Tu, Huojin, Jin, Lan, Lin, Jing, Xu, Weizhong, Yu, Tzu Chiang, Lu, Wei, Wu, Jinggang, Wang, Chenyu, Cong, Zhepeng, Tang, Ji Yue
Published in ECS transactions (16.03.2012)
Published in ECS transactions (16.03.2012)
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Journal Article
Anomalous Off-Leakage Currents in CMOS Devices and Its Countermeasures
He, Yonggen, Kuo, Jared, Chen, Yong, Zhou, Dibao, Ju, Jianhua, Tang, Ji Yue, Zhao, Zhibiao, Yin, Ming, Lu, Junfeng
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Journal Article
Process match between DSA and LSA for ultra-shallow junction formation
Yonggen He, Bing Wu, Guobin Yu, Yong Chen, Hailong Liu, Wei Lu, Jingang Wu, Zhang, D. W., Chenyu Wang, Ji Yue Tang, Ganming Zhao
Published in 2012 12th International Workshop on Junction Technology (01.05.2012)
Published in 2012 12th International Workshop on Junction Technology (01.05.2012)
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Conference Proceeding
Investigation of Ni-based silicide formation by different dynamic surface annealing approaches
Yonggen He, Bing Wu, Guobin Yu, Jin Lin, Zhang, S, Jiong-Ping Lu, Jingang Wu, JiYue Tang, Ganming Zhao
Published in 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) (01.09.2010)
Published in 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) (01.09.2010)
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Conference Proceeding
METHOD FOR FORMING A POLYSILICON FILM
PRADHAN KAILASH, TANG JI YUE, ZHAO ZHIBIAO, SEUTTER SEAN MICHAEL, FANG ZHIJUN, WANG RUIPING
Year of Publication 12.08.2010
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Year of Publication 12.08.2010
Patent
Method for forming a polysilicon film
ZHAO, ZHI-BIAO, TANG, JI YUE, SEUTTER, SEAN MICHAEL, FANG, ZHI-JUN, WANG, RUIPING, PRADHAN, KAILASH
Year of Publication 16.11.2009
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Year of Publication 16.11.2009
Patent