High-Frequency Resonator Using A1 Lamb Wave Mode in LiTaO3 Plate
Assila, Najoua, Kadota, Michio, Tanaka, Shuji
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.09.2019)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.09.2019)
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Journal Article
A Two-Axis Orthogonal Resonator for Variable Sensitivity Mode Localization Sensing
Nagasaka, Yuta, Baronchelli, Alessia, Tanaka, Shuji, Tsukamoto, Takashiro
Published in Sensors (Basel, Switzerland) (21.06.2024)
Published in Sensors (Basel, Switzerland) (21.06.2024)
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Journal Article
Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope
Wang, Shihe, Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji
Published in Sensors (Basel, Switzerland) (08.03.2023)
Published in Sensors (Basel, Switzerland) (08.03.2023)
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Journal Article
Triple Mass Resonator for Electrostatic Quality Factor Tuning
Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji
Published in Journal of microelectromechanical systems (01.04.2022)
Published in Journal of microelectromechanical systems (01.04.2022)
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Journal Article
Tailoring material properties of electrochemically deposited Al film from chloroaluminate ionic liquid for microsystem technology using pulsed deposition
Al Farisi, Muhammad Salman, Tsukamoto, Takashiro, Tanaka, Shuji
Published in Sensors and actuators. A. Physical. (01.12.2020)
Published in Sensors and actuators. A. Physical. (01.12.2020)
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Journal Article
Sputter Deposition and Characterization of Sm-Doped Pb(Mg1/3, Nb2/3)O₃-PbTiO₃ Epitaxial Thin Film on Si Toward Giant-Piezoelectric Thin Film for MEMS Actuator Application
Qi, Xuanmeng, Yoshida, Shinya, Tanaka, Shuji
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.05.2022)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.05.2022)
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Journal Article
Feasibility study of ultrasonic biometrics based on finger vessel imaging by epitaxial-PZT/Si piezoelectric micromachined ultrasonic transducer
Liu, Ziyi, Yoshida, Shinya, Horie, Toshiaki, Okamoto, Shoji, Takayama, Ryoichi, Tanaka, Shuji
Published in Sensors and actuators. A. Physical. (01.09.2020)
Published in Sensors and actuators. A. Physical. (01.09.2020)
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Journal Article
Laterally vibrating MEMS resonant vacuum sensor based on cavity-SOI process for evaluation of wide range of sealed cavity pressure
Liu, Cong, Froemel, Joerg, Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji
Published in Microsystem technologies : sensors, actuators, systems integration (04.02.2019)
Published in Microsystem technologies : sensors, actuators, systems integration (04.02.2019)
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Journal Article
Design and Fabrication Technology of Low Profile Tactile Sensor with Digital Interface for Whole Body Robot Skin
Makihata, Mitsutoshi, Muroyama, Masanori, Tanaka, Shuji, Nakayama, Takahiro, Nonomura, Yutaka, Esashi, Masayoshi
Published in Sensors (Basel, Switzerland) (21.07.2018)
Published in Sensors (Basel, Switzerland) (21.07.2018)
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