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Year of Publication 12.05.2023
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Year of Publication 12.05.2023
Patent
Depth profiling of chemical bonding states of impurity atoms and their correlation with electrical activity in Si shallow junctions
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Published in 2010 International Workshop on Junction Technology Extended Abstracts (01.05.2010)
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Conference Proceeding
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Tsutsui, K, Tanaka, M, Hoshino, N, Nohira, H, Kakushima, K, Ahmet, P, Sasaki, Y, Mizuno, B, Muro, T, Kinoshita, T, Hattori, T, Iwai, H
Published in 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (01.11.2010)
Published in 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (01.11.2010)
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Conference Proceeding