Characterization of reactive ion etching of benzocyclobutente in SF sub(6)/O sub(2) plasmas
Chen, Qianwen, Wang, Zheyao, Tan, Zhiming, Liu, Litian
Published in Microelectronic engineering (01.10.2010)
Published in Microelectronic engineering (01.10.2010)
Get full text
Journal Article
Enhanced Semantic Segmentation Pipeline for WeatherProof Dataset Challenge
Zhang, Nan, Zhang, Xidan, Wei, Jianing, Wang, Fangjun, Tan, Zhiming
Published in arXiv.org (07.06.2024)
Published in arXiv.org (07.06.2024)
Get full text
Paper
Journal Article
Characterization of reactive ion etching of benzocyclobutente in SF 6/O 2 plasmas
Chen, Qianwen, Wang, Zheyao, Tan, Zhiming, Liu, Litian
Published in Microelectronic engineering (2010)
Published in Microelectronic engineering (2010)
Get full text
Journal Article